2016
DOI: 10.1088/1742-6596/773/1/012115
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Annular screen printed thermoelectric generators for ultra-low-power sensor applications

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Cited by 5 publications
(1 citation statement)
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“…Various methods are used for the fabrication of modern thermoelectric microsensors (e.g., temperature [12,13], heat flux [14,15], thermal insolation [15,16,17], laser power [1,18,19], Seebeck nanoantennas for solar energy harvesting [20] or calorimeters [21]) and microgenerators [1,2,3,4,5,6,7,10,22,23,24,25,26,27]—classical semiconductor technology and silicon micromachining [1], volume micromachining [1,5,6,9,25] (where, for example, vapor phase soldering is used to improve solder joint quality and reliability of the various microgenerator parts [28]), plasma spraying and laser patterning [29,30], thin-film deposition (evaporation, magnetron sputtering, electrochemical deposition) [3,8,24,25,31], thick-film technology (planar, 3D, on flexible substrates, alumina or LTCC ones) [2,4,6,7,10,11,12,13,22,26,32,33,34,35]. …”
Section: Introductionmentioning
confidence: 99%
“…Various methods are used for the fabrication of modern thermoelectric microsensors (e.g., temperature [12,13], heat flux [14,15], thermal insolation [15,16,17], laser power [1,18,19], Seebeck nanoantennas for solar energy harvesting [20] or calorimeters [21]) and microgenerators [1,2,3,4,5,6,7,10,22,23,24,25,26,27]—classical semiconductor technology and silicon micromachining [1], volume micromachining [1,5,6,9,25] (where, for example, vapor phase soldering is used to improve solder joint quality and reliability of the various microgenerator parts [28]), plasma spraying and laser patterning [29,30], thin-film deposition (evaporation, magnetron sputtering, electrochemical deposition) [3,8,24,25,31], thick-film technology (planar, 3D, on flexible substrates, alumina or LTCC ones) [2,4,6,7,10,11,12,13,22,26,32,33,34,35]. …”
Section: Introductionmentioning
confidence: 99%