2018
DOI: 10.1088/1361-6463/aab321
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Anomalous effects in the aluminum oxide sputtering yield

Abstract: The sputtering yield of aluminum oxide during reactive magnetron sputtering has been quantified by a new and fast method. The method is based on the meticulous determination of the reactive gas consumption during reactive DC magnetron sputtering and has been deployed to determine the sputtering yield of aluminum oxide. The accuracy of the proposed method is demonstrated by comparing its results to the common weight loss method excluding secondary effects such as redeposition. Both methods exhibit a decrease in… Show more

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Cited by 11 publications
(10 citation statements)
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“…From equation ( 2), it follows that the target state completely determines the discharge voltage at a fixed discharge current [11]. Since also the sputter yields are connected to the discharge voltage [19], a change of the discharge current will affect through equation ( 2) also the sputter yield of the different materials.…”
Section: Rsd-modelmentioning
confidence: 99%
See 2 more Smart Citations
“…From equation ( 2), it follows that the target state completely determines the discharge voltage at a fixed discharge current [11]. Since also the sputter yields are connected to the discharge voltage [19], a change of the discharge current will affect through equation ( 2) also the sputter yield of the different materials.…”
Section: Rsd-modelmentioning
confidence: 99%
“…In the above analysis, the sputter yield dependency on the discharge voltage was not included. It is however known that the yields vary with the discharge voltage [19]. Figure 6 compares B hyst [V (P R 2 )] as a function of the discharge current.…”
Section: Scalingmentioning
confidence: 99%
See 1 more Smart Citation
“…By explicitly describing this reaction, the model predicts a fraction of non-reacted gas atoms in the target. Although no direct evidence can be given for their presence, there is substantial experimental indirect evidence such as discharge voltage changes [10,11], time dependent sputter yields [12], and the observation of a second hysteresis [13]. The latter is attributed to a change of the target state due to the presence of these non-reacted atoms.…”
Section: Reactive Sputtering and The Rsd Modelmentioning
confidence: 99%
“…Consequently, semiconducting oxides such as ZnO, ln 2 O 3 and SnO 2 have been synthesized into many nanostructures such as one-dimensional (1D) nanowires, and they have also been combined as nanodevices and/or sensors [7][8][9]. The nanostructures can be synthesized by several methods such as PVD, laser ablation, chemical vapor deposition, electrochemical deposition, thermal evaporation and gas-deposition [10][11][12][13][14][15][16][17]. Oxides have two major characteristics: multiple valence ions and anion defects.…”
Section: Introductionmentioning
confidence: 99%