Anomalous Oxide Charge Variation Identified by Alternating Current Surface Photovoltage Method in Cr-Aqueous-Solution-Rinsed p-Type Si(001) Wafers Exposed to Air
Abstract:Chromium (Cr)-aqueous-solution-rinsed and/or hydrofluoric acid (HF)-solution-dipped p-type silicon (Si) (001) wafer surfaces are investigated by the frequency-dependent alternating current (AC) surface photovoltage (SPV) method. At the Cr(OH)3/p-type Si interface, in principle, a Schottky barrier could not possibly be generated. The Cr ion (Cr3+) is considered to forcibly deprive a p-type Si substrate of electrons during metallization (Cr3++3e-→Cr). Thus, at an early stage of air exposure, a positive fixed oxi… Show more
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