Anomaly of film porosity dependence on deposition rate

Stagon, Stephen P.; Huang, Hanchen; Baldwin, J. Kevin; Misra, Amit

doi:10.1063/1.3683542

Cited by 17 publications

(10 citation statements)

References 18 publications

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“…This bundling association has since been reported in a large variety of OAD thin films prepared by either evaporation or MS [143][144][145][223][224][225][226], and though development of this microstructural arrangement has been mainly reported for metal thin films [10,11,54,56,144,145,223,224], it has also been utilized as a template structure with oxides to develop new composite thin films (see for example [225] and [226]). Surprisingly, aside from some detailed discussions in early reviews [10], this bundling phenomenon has not attracted much attention in recent investigations on OAD thin films.…”

Section: Correlation Distance and Bundling Associationmentioning

confidence: 94%

“…For example, the porosity of a Cu OAD thin film is qualitatively related to its deposition rate and the wetting ability of copper on a silicon substrate, in such a way that the initially formed nuclei control the posterior evolution of the thin film's microstructure and therefore also the final porosity of the film [143]. Modeling the OAD thin film microstructure and growth by Monte Carlo (MC) simulation and other numerical methods has been carried out to better understand the evolution of porosity as a function of the deposition angle [93,228], with Suzuki et al [62] deducing that evaporated OAD thin films should present a maximum surface area at an evaporation angle of 70°.…”

Section: Porosity and Adsorption Propertiesmentioning

confidence: 99%

“…While e-beam evaporation has been used for the deposition of a large variety of materials, including amorphous and crystalline semiconductors [80,86,106,139,140], metals [29,[141][142][143][144][145][146], oxides [48,79,89,[147][148][149] and even molecular materials [71,103,150], MS has been the most widely used method for the deposition of metals and oxides when control over the crystalline structure and/or surface roughness is an issue.…”

Section: Magnetron Sputteringmentioning

confidence: 99%

See 2 more Smart Citations

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

616

436

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a b s t r a c tThe oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostructuration possibilities, as well as a comprehensive description of the applications benefiting from its incorporation in actual devices. In contrast with other reviews on the subject, the electron beam assisted evaporation technique is analyzed along with other methods operating at oblique angles, including, among others, magnetron sputtering and pulsed laser or ion beam-assisted deposition techniques. To account for the existing differences between deposition in vacuum or in the presence of a plasma, mechanistic simulations are critically revised, discussing well-established paradigms such as the tangent or cosine rules, and proposing new models that explain the growth of tilted porous nanostructures. In the second part, we present an extensive description of applications wherein oblique-angle-deposited thin films are of relevance. From there, we proceed by considering the requirements of a large number of functional devices in which these films are currently being utilized (e.g., solar cells, Li batteries, electrochromic glasses, biomaterials, sensors, etc.), and subsequently describe how and why these nanostructured materials meet with these needs.

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Section: Correlation Distance and Bundling Associationmentioning

confidence: 94%

Section: Porosity and Adsorption Propertiesmentioning

confidence: 99%

Section: Magnetron Sputteringmentioning

confidence: 99%

See 1 more Smart Citation

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

616

436

View full text Add to dashboard Cite

show abstract

“…Surprisingly, the two first BMs present a strong polarization activity when interrogated with linearly polarized light, while the two latter are practically insensitive to the polarization state. Thanks to a thorough analysis by scanning electron microscopy (SEM) and a field ion beam (FIB) set-up we have been able to show that association of nanocolumns, a rather general phenomenon in OAD films known with the term bundling, 30,31 is the critical morphological feature responsible for the singular macroscopic behavior of the slanted and zig-zag BMs. Bundling association of nanocolumns is believed to extend along the whole thickness of single oxide OAD thin films, [30][31][32][33] a feature that we have confirmed here by FIB-SEM analysis of the BMs.…”

Section: Morphology and Fence-bundling Association Of Nanocolumnsmentioning

confidence: 99%

Optofluidic Modulation of Self-Associated Nanostructural Units Forming Planar Bragg Microcavities

et al. 2015

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Bragg microcavities (BMs) formed by the successive stacking of nanocolumnar porous SiO2 and TiO2 layers with slanted, zigzag, chiral, and vertical configurations are prepared by physical vapor deposition at oblique angles while azimuthally varying the substrate orientation during the multilayer growth. The slanted and zigzag BMs act as wavelength-selective optical retarders when they are illuminated with linearly polarized light, while no polarization dependence is observed for the chiral and vertical cavities. This distinct optical behavior is attributed to a self-nanostructuration mechanism involving a fence-bundling association of nanocolumns as observed by focused ion beam scanning electron microscopy in the slanted and zigzag microcavities. The outstanding retarder response of the optically active BMs can be effectively modulated by dynamic infiltration of nano- and mesopores with liquids of different refraction indices acting as a switch of the polarization behavior. The unprecedented polarization and tunable optofluidic properties of these nanostructured photonic systems have been successfully simulated with a simple model that assumes a certain birefringence for the individual stacked layers and accounts for the light interference phenomena developed in the BMs. The possibilities of this type of self-arranged nanostructured and optically active BMs for liquid sensing and monitoring applications are discussed.

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“…In most materials, it is necessary to drop the lateral dimension to ∼ 10 nm before size effects begin to become dominant and deliver a qualitative change in properties [1] . Among objects on this length scale, small metallic nanorods, those that are ∼ 10 nm in diameter in comparison to larger metallic nanorods that are ∼ 100 nm in diameters, have emerged as technologically important, and their fabrication has been widely reported in the literature [2][3][4][5][6][7] .…”

Section: Introductionmentioning

confidence: 99%

Syntheses and applications of small metallic nanorods from solution and physical vapor deposition

Stagon

Huang

2013

Nanotechnology Reviews

Self Cite

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Metallic nanorods have a wide range of important technological applications. Fabrication of metallic nanorods of ∼ 100 nm using physical vapor deposition (PVD) has been commonplace for several decades. On this length scale, nanorods have similar functionalities to bulk thin films with the advantage of increased surface area. When the lateral dimension is decreased to ∼ 10 nm new functionalities emerge that are not present in thin film counterparts, such as catalysis. Small metallic nanorods, those ∼ 10 nm, have classically been made through solution-based synthesis. Alternatively, recent advances in scientific understanding, a framework of nanorod growth, have opened the door to the fabrication of small nanorods through PVD. Growing small nanorods through PVD offers technologically relevant advantages over solutionbased processing like direct control of aspect ratio, pure high-vacuum processing, and oriented attachment to a substrate. Among materials, gold (Au) has a wide range of technological applications and is a good prototype for understanding the behavior of common face center cubic metals. This article reviews solution processing and PVD of small metallic nanorods using Au as a prototype, in terms of scientific understanding and fabrication knowledge, and further compares and contrasts the two approaches.

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Anomaly of film porosity dependence on deposition rate

Cited by 17 publications

References 18 publications

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Optofluidic Modulation of Self-Associated Nanostructural Units Forming Planar Bragg Microcavities

Syntheses and applications of small metallic nanorods from solution and physical vapor deposition

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