2012
DOI: 10.1063/1.3673001
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Anti-drift and auto-alignment mechanism for an astigmatic atomic force microscope system based on a digital versatile disk optical head

Abstract: In this work, an anti-drift and auto-alignment mechanism is applied to an astigmatic detection system (ADS)-based atomic force microscope (AFM) for drift compensation and cantilever alignment. The optical path of the ADS adopts a commercial digital versatile disc (DVD) optical head using the astigmatic focus error signal. The ADS-based astigmatic AFM is lightweight, compact size, low priced, and easy to use. Furthermore, the optical head is capable of measuring sub-atomic displacements of high-frequency AFM pr… Show more

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Cited by 18 publications
(14 citation statements)
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“…Consequently, the optical path difference could reduce in more than 20% the reflected laser intensity. 17 …”
Section: Opening the Black Box: The Opu Mechanismmentioning
confidence: 99%
“…Consequently, the optical path difference could reduce in more than 20% the reflected laser intensity. 17 …”
Section: Opening the Black Box: The Opu Mechanismmentioning
confidence: 99%
“…Furthermore, the low-cost OPU can achieve nano-meter displacement sensitivity from 0.1 Hz to MHz signal bandwidth. OPUs have been successfully utilized for various applications, such as AFMs [14] , [15] , [16] , stereolithography 3D printing [17] , photolithography [18] , and biosensing [19] .…”
Section: Hardware In Contextmentioning
confidence: 99%
“…The mass produced OPU (costs less than five USD) provides not only a light source but also diffraction-limited optics in a compact size, similar to a car key. Given its high-precision measurements and multiple wavelength laser modes, the OPU has been used for various other applications, such as atomic force microscopy [26][27][28] , biosensing 29,30 , and photolithography 31 . The HD-DVD OPU equips an aspherical objective lens with a numerical aperture of 0.65, aperture diameter of 3 mm, and assumed laser beam quality of 1.…”
mentioning
confidence: 99%