Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics

Abstract

The increasing demand for optics quality requires the lowest optical power loss, which can occur from unwanted reflections. Laser direct writing (LDW) allows for the fabrication of complex structures, which is particularly advantageous in micro-optic applications. This research demonstrates the possibility of forming an anti-reflective coating on hybrid polymer micro-lenses fabricated by employing LDW without changing their geometry. Such coating deposited via atomic layer deposition (ALD) decreased the reflection from 3.3% to 0.1% at a wavelength of 633 nm for one surface of hybrid organic–inorganic SZ2080™ material. This research validates the compatibility of ALD with LDW 3D multiphoton lithography synergistically, expanding its applications on optical grade sub-100 μm scale micro-optics.

Frontiers of Laser‐Based 3D Printing: A Perspective on Multi‐Photon Lithography

“…Atomic layer deposition, for instance, can be employed to enhance the transparency of printed structures, an approach that is particularly relevant for micro-optics. [71] Moreover, if the inorganic component of the photoresist contains sufficient metal-binding moieties, printed micro-or nanostructures can be selectively metalized through silver electroless plating, proving to be highly effective in the production of electromagnetic metamaterials (Figure 3A). [66,72] Another growing trend in post-processing is the heat treatment of micro-and nanostructures, known as pyrolysis or calcination.…”

Editorial of the Special Issue ‘Nano-Optics and Nano-Optoelectronics: Challenges and Future Trends’

“…Due to their exceptional properties, these nanostructures/nanomaterials offer a diverse range of novel applications in photodetectors [ 1 , 9 , 11 ], solar cells [ 2 , 9 , 10 ], modulators [ 1 , 3 , 8 ], light emitters [ 1 , 7 ], optoelectronic integration [ 5 , 6 ], super-resolved imaging [ 4 , 5 ], nanofabrication [ 4 ], etc. This Special Issue also encompasses the latest advancements in practical nano-optical and nano-optoelectronic technologies, such as femtosecond laser nano-processing [ 12 ], atomic layer coating [ 13 ], and new designs for photonic integration engineering [ 14 ]. It concludes with reviews that aim to offer comprehensive overviews of nano-related infrared absorption technology [ 15 ] and neuromorphic photonics devices [ 16 ], and to predict the futural trends in these nano-optic and nano-optoelectronic topics.…”

“…The implementation of an fs laser to compensate for the phase bias in MZI electro-optic switches results in reduced power consumption during operation, so it is very efficient in optimizing nanophotonic processing. Astrauskytė et al [ 13 ] discuss the feasibility of producing an anti-reflective coating on hybrid polymer micro-lenses manufactured through LDW techniques while maintaining their original geometry. Through the utilization of atomic layer deposition (ALD), this coating was able to greatly decrease reflection.…”