2009
DOI: 10.1109/tmag.2009.2016237
|View full text |Cite
|
Sign up to set email alerts
|

Anti-Shock Air Gap Control for SIL-Based Near-Field Recording System

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2010
2010
2017
2017

Publication Types

Select...
4
2

Relationship

0
6

Authors

Journals

citations
Cited by 14 publications
(2 citation statements)
references
References 6 publications
0
2
0
Order By: Relevance
“…In terms of the bandwidth, we selected a dead-zone nonlinear controller, the gain value of which was set to 70 on the basis of the preexperiment results. 14) In addition, to facilitate faster and more accurate cancellation of specific narrow band disturbances, such as experimentally measured at 60, 105, and 240 Hz, a NBDF-based controller was designed and the gain value was set to 0.0003.…”
Section: Design Of Nanogap Control Algorithmmentioning
confidence: 99%
See 1 more Smart Citation
“…In terms of the bandwidth, we selected a dead-zone nonlinear controller, the gain value of which was set to 70 on the basis of the preexperiment results. 14) In addition, to facilitate faster and more accurate cancellation of specific narrow band disturbances, such as experimentally measured at 60, 105, and 240 Hz, a NBDF-based controller was designed and the gain value was set to 0.0003.…”
Section: Design Of Nanogap Control Algorithmmentioning
confidence: 99%
“…The SIL-based nanolithography method can precisely control the nanogap between the optical head and the substrate with an active gap controller that uses the gap error signal (GES); [12][13][14] thus the line patterning with a several tens nanometer-size width can be performed at high speed. To realize an optical head beyond the diffraction limit, we designed and fabricated a plasmonic SIL optical head with an optimized sharp-ridged hightransmission nanoaperture on an Al film.…”
Section: Introductionmentioning
confidence: 99%