The paper presents the results of a study of the surface charge of polymer materials modified with fluorocarbon films formed by ion-plasma technology at different CF4 contents in the CF4 + CeH12 plasma mixture. Nanostructured fluorocarbon films formed on the surface of polyethyleneterephthalate and polystyrene have a positive charge in the region of “transient” processes, and films on the surface of polytetrafluoroethylene have a negative charge, which is associated with different topology of the relief on the surface of these polymers, as well as their polarity.