1987
DOI: 10.1364/ao.26.001142
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Antireflection effect in ultrahigh spatial-frequency holographic relief gratings

Abstract: An interpretation model for low reflectivity in ultrahigh spatial-frequency holographic relief gratings is proposed. The model is based on the concept that the grating effective index, caused by grating ultrahigh spatial frequency, is graded in the depth direction and forms an antireflective constitution similar to the multilayer coating. Numerical results show that a sinusoidal grating is antireflective over wide groove depth, wavelength and incident angle ranges, and a grating with nearly triangular section,… Show more

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Cited by 180 publications
(91 citation statements)
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“…This allows for use of the technology on a much larger range of materials compared to thin films and eliminates the issues related with film-substrate adhesion. The very low levels of reflectance achieved by nature using moth-eye arrays have inspired many attempts to replicate such structures in technologically-important materials including photoresist on glass [6][7][8][9], in quartz [10][11][12][13][14] and in silicon [15][16][17][18][19][20][21]. Applications include solar cells [7,22,23 [27] are often employed for this, however these processes lend themselves to the formation of regular arrays of pillars arranged in a square or hexagonal array across the whole of the patterned area.…”
Section: Introductionmentioning
confidence: 99%
“…This allows for use of the technology on a much larger range of materials compared to thin films and eliminates the issues related with film-substrate adhesion. The very low levels of reflectance achieved by nature using moth-eye arrays have inspired many attempts to replicate such structures in technologically-important materials including photoresist on glass [6][7][8][9], in quartz [10][11][12][13][14] and in silicon [15][16][17][18][19][20][21]. Applications include solar cells [7,22,23 [27] are often employed for this, however these processes lend themselves to the formation of regular arrays of pillars arranged in a square or hexagonal array across the whole of the patterned area.…”
Section: Introductionmentioning
confidence: 99%
“…Antireflective condition can be generated by forming SWSs in front of the detector [174]. Such structures are also denoted as high spatial frequency structures or subwavelength surface textures [175]. SWSs generally have a two-fold function in light management in photodetectors: since they effectively represent gradientindex structures, they produce a broadband impedance matching that leads to a broadband AR performance.…”
Section: Sws For Armentioning
confidence: 99%
“…Because photopolymer isn't hard sufficiently for optical copy process, a protection glass sheet covers the contacting surface. The following equation (3) is applied to calculate the diffraction efficiency (DE) [14]. The hologram master has low light efficiency, which is sum of 0th order and 1st order efficiency, as an ordinary amplitude hologram does.…”
Section: Development Of the Binary Hologram Master (Eb Lithography)mentioning
confidence: 99%