“…Post-RTA in different temperatures (400 °C, 500 °C, 600 °C) was applied in EIS structure [ 21 ]. The sensor performance including sensitivity [ 22 ], hysteresis [ 23 ], and drift, rate [ 24 ], were measured to find the optimal annealing condition [ 25 ]. To examine the improvements of material properties, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and atomic force microscope (AFM) [ 26 , 27 ] were used to examine the crystalline structure, chemical bindings, and surface roughness.…”