“…In this experiment, 289 (17 17 matrix pattern) and 64 columns (8 8 matrix pattern) were fabricated for 200 and 500 m diameter microcavities, respectively. Before pouring PDMS, a thin layer of photoresist (OFPR-800, positive photoresist, Tokyo Ohka) with a thickness of 4 m was formed onto the substrate by spin-coating for 40 s at 2000 rpm and then baking for 30 min at 80 o C. The thin photoresist layer worked as a sacrifice layer to release a cured PDMS sheet from the substrate (Nam et al, 2006). Then, the mixture of PDMS pre-polymer and catalyst (10:1 ratio, Silpot 184, Dow Corning) was spin-coated on the substrate for 80 s at 2500 rpm and 40 s at 2000 rpm, for 200 and 500 m diameter microcavites, respectively.…”