“…The transmitted electrons can be analyzed by various detectors to provide accurate information about atomic arrangement, crystalline phases and defects, allowing for the achievement of structural, chemical and electronic characterization across length scales ranging from the atomic scale crystallography to the microstructure. Advanced TEMs are capable of an atomic-scale resolution below 0.5 Å, which is especially suited to probe thin film interfaces, defects, grain structure, orientations, dislocations, and more [59,60]. However, due to the relatively short mean free path of electrons in matter, samples must be suitably prepared as thin slices, so to study thin films, it is necessary to cut thin cross-sections of the samples (cross-sectional TEM (XTEM)) using, for example, a focused ion beam (FIB) facility.…”