Application of capillary forces and stiction for lateral displacement, alignment, suspension and locking of self-assembled microcantilevers

Rose, Franck; Hattori, Masatomo; Kobayashi, D.; Toshiyoshi, Hiroshi; Fujita, Hiroyuki; Kawakatsu, Hideki

doi:10.1088/0960-1317/16/10/022

Cited by 5 publications

(4 citation statements)

References 45 publications

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“…This can lead to partial self-alignment (A 1 ), corner self-alignment (A 2 ) or edge self-alignment (A 3 ). 70,71 The component may conversely overshoot past the receptor edge and pull the contact line with it, away from the edge, when small liquid viscosity and/or large liquid volumes induce underdamped motion. Insufficiently large offsets may also not be conducive to the alignment conditions A 1 -A 3 .…”

Section: Shape Matchingmentioning

confidence: 99%

“…73 The capillary force of molten solder bumps between matching pads on both board and sensors was exploited, and three devices were assembled simultaneously. A capillary approach was also applied to the fluidic assembly of a GaAs-based microcantilever spin injector, 70 microcantilever for atomic force microscopy, 71 and of millimeter-sized components with inner cavities. 63 In this case the hydrophilic receptors, coated with a thin layer of water-diluted hydrofluoric acid, matched only the perimeter of the components.…”

Section: Shape Matchingmentioning

confidence: 99%

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Surface tension-driven self-alignment

et al. 2017

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Surface tension-driven self-alignment is a passive and highly-accurate positioning mechanism that can significantly simplify and enhance the construction of advanced microsystems. After years of research, demonstrations and developments, the surface engineering and manufacturing technology enabling capillary self-alignment has achieved a degree of maturity conducive to a successful transfer to industrial practice. In view of this transition, a broad and accessible review of the physics, material science and applications of capillary self-alignment is presented. Statics and dynamics of the self-aligning action of deformed liquid bridges are explained through simple models and experiments, and all fundamental aspects of surface patterning and conditioning, of choice, deposition and confinement of liquids, and of component feeding and interconnection to substrates are illustrated through relevant applications in micro- and nanotechnology. A final outline addresses remaining challenges and additional extensions envisioned to further spread the use and fully exploit the potential of the technique.

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Section: Shape Matchingmentioning

confidence: 99%

Section: Shape Matchingmentioning

confidence: 99%

Surface tension-driven self-alignment

et al. 2017

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“…Agache et al investigated stiction-controlled locking systems for 3D microstructures such as scratch drive actuators [16]. Rose et al reported on the application of stiction and capillary forces to the precise lateral displacement, alignment, suspension and locking of microcantilevers for atomic force microscopy applications [17]. …”

Section: Self-assembly Of Microelectromechanical Structuresmentioning

confidence: 99%

Self-assembly from milli- to nanoscales: methods and applications

Mastrangeli

Abbasi

Varel

et al. 2009

J. Micromech. Microeng.

230

202

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The design and fabrication techniques for microelectromechanical systems (MEMS) and nanodevices are progressing rapidly. However, due to material and process flow incompatibilities in the fabrication of sensors, actuators and electronic circuitry, a final packaging step is often necessary to integrate all components of a heterogeneous microsystem on a common substrate. Robotic pick-and-place, although accurate and reliable at larger scales, is a serial process that downscales unfavorably due to stiction problems, fragility and sheer number of components. Self-assembly, on the other hand, is parallel and can be used for device sizes ranging from millimeters to nanometers. In this review, the state-of-the-art in methods and applications for self-assembly is reviewed. Methods for assembling three-dimensional (3D) MEMS structures out of two-dimensional (2D) ones are described. The use of capillary forces for folding 2D plates into 3D structures, as well as assembling parts onto a common substrate or aggregating parts to each other into 2D or 3D structures, is discussed. Shape matching and guided assembly by magnetic forces and electric fields are also reviewed. Finally, colloidal self-assembly and DNA-based self-assembly, mainly used at the nanoscale, are surveyed, and aspects of theoretical modeling of stochastic assembly processes are discussed.

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“…A nice combination of stiction and surface tension is described in [134]. A spring is contacted by the drying liquid, moving a construction laterally on the wafer (in this case a cantilever beam with an atomic force microscope tip).…”

Section: Self-assembly In Memsmentioning

confidence: 99%

Self-assembly of (sub-)micron particles into supermaterials

Elwenspoek¹,

Abelmann²,

Berenschot³

et al. 2010

J. Micromech. Microeng.

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We review aspects of static self-assembly with regard to the synthesizing of new types of three-dimensional materials made of specifically designed particles in the 100 nm to 10 μm range. Mechanical interconnection technologies based on static friction used in the assembly of macroscopic systems (such as screws and nails) are unsuitable for self-assembly. An analogy of self-assembly with first-order phase transitions is used to argue that self-assembly is a process requiring interfaces separating assembled and disordered regions. Available types of interaction are reviewed with emphasis on scaling. We discuss at some length how interaction and dynamic properties scale with respect to the particle size. Chains of particles seem to be of particular importance as they might form three-dimensional structures similar to proteins. These structures are constrained by the sequence of the particles and by their interactions between themselves and with the solvent. Using chains might provide a viable route to complex, inhomogeneous, supermaterials and systems. Kinetic processes, specifically nucleation and the relationship between self-assembly and thermodynamic phase transitions form a major part of this paper. Finally we review some applications of self-assembly, notably in MEMS, and put forward some ideas for the assembly of new types of (smart) supermaterials with interesting optical, mechanical, electrical and magnetic properties and describe some of the technological challenges we face when attempting to realize these materials and systems thereof.

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Application of capillary forces and stiction for lateral displacement, alignment, suspension and locking of self-assembled microcantilevers

Cited by 5 publications

References 45 publications

Surface tension-driven self-alignment

Surface tension-driven self-alignment

Self-assembly from milli- to nanoscales: methods and applications

Self-assembly of (sub-)micron particles into supermaterials

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