Application of Cerium Oxide Nanopowders for Silicon Polishing

Chkhalo, N. I.; Akhsakhalyan, A. A.; Vainer, Yu. A.; Zorina, M. V.; Pestov, A. E.; Svechnikov, M. V.; Toropov, M. N.; Kumar, N.; Tokunov, Yu. M.

doi:10.1134/s106378422403006x

Tech. Phys.

2024

DOI: 10.1134/s106378422403006x

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Application of Cerium Oxide Nanopowders for Silicon Polishing

N. I. Chkhalo,

A. A. Akhsakhalyan,

Yu. A. Vainer

et al.

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Application of Cerium Oxide Nanopowders for Silicon Polishing

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References 29 publications

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