Articles you may be interested inHole injection-reduced hot carrier degradation in n-channel metal-oxide-semiconductor field-effect-transistors with high-k gate dielectric Appl. Phys. Lett. 102, 073507 (2013); 10.1063/1.4791676 Processing dependences of channel hot-carrier degradation on strained-Si p -channel metal-oxide semiconductor field-effect transistors J. Vac. Sci. Technol. B 29, 01AB07 (2011); 10.1116/1.3523396 1/f noise in n-channel metal-oxide-semiconductor field-effect transistors under different hot-carrier stresses Hot-carrier effects on the scattering parameters of lightly doped drain n -type metal-oxide-semiconductor field effect transistors J. Vac. Sci. Technol. B 16, 628 (1998); 10.1116/1.589873Hot-carrier effects on the scattering parameters of lightly doped drain n -type metal-oxide-semiconductor field effect transistor A theoretical model for the MOSFET local oxide capacitance as a crucial parameter for the characterization of hot-carrier degradation has been developed. For this purpose, the conformal mapping technique is used. On the basis of the proposed approach a refined extraction scheme for the defect distribution from charge-pumping measurements has been employed. Assuming the extracted spatial trap distributions at different stress times as input, the transfer characteristics and linear drain current degradation are numerically calculated and compared with the experimental results. A very good agreement is achieved. These results demonstrate that the coordinate dependence of the oxide capacitance is extremely important for an accurate extraction of the defect profile particularly for large stress times. Additionally, the obtained results confirm the findings of our physics-based model of hot-carrier degradation.