Metallic thin films, micro-devices and microelectromechanical systems (MEMS) suffer from a lack of thermal stability and poor mechanical properties at high temperatures. By contrast, cast and forged Ni-base superalloys have excellent high temperature properties, but shaping and processing routes for superalloy micro devices have not been developed. Here free-standing nanocrystalline foils of the Ni-based superalloy, Haynes 718, were produced by magnetron sputtering and mechanical removal from Si substrates. Precipitation studies revealed unique transformation paths compared to the bulk alloy. Heat treated foils possess yield stresses of 400MPa at 700°C. These results suggest that sputtered superalloys could extend the operating ranges of micro-devices. Furthermore, nanocrystalline alloys obtained through vapor phase processing provide thermal processing paths unattainable from the melt.