Proceedings 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2003)
DOI: 10.1109/aim.2003.1225079
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Application of electromagnetic actuator using rubber film to three-degrees-of-freedom precision stage

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Cited by 2 publications
(2 citation statements)
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“…Nomura et al [15] proposed a 3-DoF (Degree of Freedom) precision stage with an electromagnetic actuator (RE actuator) using a rubber film. The RE actuator is made up of three parts: an upside magnetic pole, an underside electromagnet, and a rubber film between them.…”
Section: State Of the Artmentioning
confidence: 99%
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“…Nomura et al [15] proposed a 3-DoF (Degree of Freedom) precision stage with an electromagnetic actuator (RE actuator) using a rubber film. The RE actuator is made up of three parts: an upside magnetic pole, an underside electromagnet, and a rubber film between them.…”
Section: State Of the Artmentioning
confidence: 99%
“…The table supported with four stiff porous bearings can be positioned on an aerostatic plane. The table can be fixed at the desired position on the ceramic base by the attracting force with a vacuum pump. Nomura et al [15] proposed a 3-DoF (Degree of Freedom) precision stage with an electromagnetic actuator (RE actuator) using a rubber film. The RE actuator is made up of three parts: an upside magnetic pole, an underside electromagnet, and a rubber film between them.…”
Section: State Of the Artmentioning
confidence: 99%