The crystallographic orientation of magnetite (Fe 3 O 4 ) thin films was measured using electron backscatter diffraction (EBSD). Misorientation boundaries appear in maps of angular misorientation data. The distribution of misorientation angles changes after annealing the samples in air at 250 C. Most small-angle misorientations ( 5 ) are removed after one minute of annealing, whereas larger misorientations (as high as 60 ) continue to persist.Index Terms-Crystal growth, electron microscopy, electron backscatter diffraction, magnetite, position measurement.