Today's high-tech industries face increasing competition and challenges. Thus, for hightech companies, making effective use of resources to enhance business performance and maintain the competitive advantage in the market has become increasingly important. Therefore, this study aimed to design a decision-making model for evaluating the efficiency and operating performance of Taiwan's listed semiconductor companies in 2010 to provide a basis for improving business performance. In view of this, this study combines data envelopment analysis (DEA) and improved grey relational analysis (IGRA) as efficiency tools to measure relative efficiencies; the semiconductor companies are divided into two groups, efficient and inefficient. We then integrate the multiple criteria decision making (MCDM) method (e.g. VlseKriterijumska Optimizacija I Kompromisno Resenje, VIKOR), IGRA and the entropy weight method to evaluate the operating performance of the efficient and inefficient groups, respectively. Establishing a reasonable, objective and valid evaluation model to measure semiconductor companies' operating efficiency can provide company managers, investors and policy makers with a reference for performance evaluation.Business operators and investors are concerned about how companies view their operating strategies and whether or not they make use of their limited resources. They are also concerned with how the external environment influences the achievement of cost minimization, revenue maximization, and sustainable business performance. Today's high-tech industries face increasing competition and challenges. Making effective use of resources to enhance production performance and maintain competitive advantage has become an increasingly important issue. Much of the previous research (Chen et al. 2006;Hung, Lu 2008;Wu et al. 2007) has paid attention to analyze input-output efficiency and the performance evaluation of the high-tech industries based on DEA. However, in addition to achieving fuller and more efficient use of resources, superior financial performance is the key success factor for companies to remain competitive in high-tech industries. Therefore, this article combines efficiency analysis, production performance and financial performance to construct an effective performance evaluation decision-making process. This approach can provide managers and investors with effective decision making process for performance evaluation.The concept of efficiency is widely used in the empirical research of company's production performance. From the perspective of resource allocation, efficiency is defined as a minimum input or maximum output with a given set of input. Efficiency measures provide a basis for evaluating and improving company's productivity. They can also help management to understand whether or not the company is achieving effective and efficient resource allocation and use. From the internal point of view of operational efficiency, company performance can be revealed by the efficiency of resource inputs and outputs. ...