The structural, morphological,
and chemical characterization of
samples is of utmost importance for a large number of scientific fields.
Furthermore, this characterization very often needs to be performed
in three dimensions and at length scales down to the nanometer. Therefore,
there is a stringent necessity to develop appropriate instrumentational
solutions to fulfill these needs. Here we report on the deployment
of magnetic sector secondary ion mass spectrometry (SIMS) on a type
of instrument widely used for such nanoscale investigations, namely,
focused ion beam (FIB)–scanning electron microscopy (SEM) instruments.
First, we present the layout of the FIB-SEM-SIMS instrument and address
its performance by using specific test samples. The achieved performance
can be summarized as follows: an overall secondary ion beam transmission
above 40%, a mass resolving power (
M
/Δ
M
) of more than 400, a detectable mass range from 1 to 400
amu, a lateral resolution in two-dimensional (2D) chemical imaging
mode of 15 nm, and a depth resolution of ∼4 nm at 3.0 keV of
beam landing energy. Second, we show results (depth profiling, 2D
imaging, three-dimensional imaging) obtained in a wide range of areas,
such as battery research, photovoltaics, multilayered samples, and
life science applications. We hereby highlight the system’s
versatile capability of conducting high-performance correlative studies
in the fields of materials science and life sciences.