Application of linear systems theory to characterize coherence scanning interferometry

Mandal, Rahul; Palodhi, Kanik; Coupland, John N.; Leach, Richard; Mansfield, Daniel

doi:10.1117/12.922435

Cited by 15 publications

(12 citation statements)

References 9 publications

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“…To the authors' knowledge, however, a spherical calibration artifact with suitable form deviation (subnanometer) is not commercially available. In previous work, a small mercury droplet deposited on glass was reported for this task since surface tension demands a spherical form to the required tolerance [18]. For routine calibration a more stable transferable artifact is required, and for this reason a calibration and adjustment protocol for CSI instrumentation based on measurements of silica microspheres was investigated.…”

Section: Measurement Of Psf/tf Characteristicsmentioning

confidence: 99%

Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics

et al. 2014

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When applied to the measurement of smooth surfaces, coherence scanning interferometry can be described by a three-dimensional linear filtering operation that is characterized either by the point-spread function in the space domain or equivalently by the transfer function (TF) in the spatial frequency domain. For an ideal, aberration-free instrument, these characteristics are defined uniquely by the numerical aperture of the objective lens and the bandwidth of the illumination source. In practice, however, physical imperfections such as those in lens aberrations, reference focus, and source alignment mean that the instrument performance is not ideal. Currently, these imperfections often go unnoticed as the instrument performance is typically only verified using rectilinear artifacts such as step heights and lateral grids. If an object of varying slope is measured, however, significant errors are often observed as the surface gradient increases. In this paper, a new method of calibration and adjustment using a silica micro-sphere as a calibration artifact is introduced. The silica microsphere was used to compute the point-spread and TF characteristics of the instrument, and the effect of these characteristics on instrument performance is discussed. Finally, a straightforward method to correct for phase and amplitude imperfections in the TF is described using a modified inverse filter.

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Section: Measurement Of Psf/tf Characteristicsmentioning

confidence: 99%

Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics

et al. 2014

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“…Recently, the application of similar ideas to cases where large strongly scattering objects are being imaged was attempted by the authors of [3][4][5], with apparent success, and this work has subsequently been considered as a possible route by which coherence scanning interferometers (CSIs) could be calibrated [4][5][6][7][8][9][10], or inform us about the imaging process [11][12][13][14][15][16][17][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

Considerations on the proposed linear theory of surface measurement for coherence scanning interferometers

Henning

Giusca

2017

Appl. Opt.

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It was suggested in [Appl. Opt.52, 3662 (2013)APOPAI0003-693510.1364/AO.52.003662] that the result of a measurement via coherence scanning interferometry could be viewed as the convolution of a point spread function of the instrument and an open surface in 3D space that lies at the air/material interface over a portion of the object's surface. Further, it was suggested that by measuring certain objects, such as ones that are very close to spherical, and whose surface is known to a sufficient level of accuracy, that a point spread function for the instrument could be determined from the measurement result. We conclude that the approximations used in this calculation do not give sufficient accuracy to allow this to be achieved, and that the truncation of the surface function from the closed surface surrounding the object is not defined sufficiently well in order to give a unique solution to the problem. The physical justification for the truncation of the surface in this manner is also questioned.

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“…Since the PSF is realistically strongly dependent on system aberrations, such information is key for accurate data analysis and system benchmarking Correspondence to: Matthew R. Foreman, Blackett Laboratory, Department of Physics, Imperial College London, Prince Consort Road, South Kensington, London, SW7 2BZ, UK. Tel: +44 (0)20 7594 7721; fax: +44 (0)20 7594 7714; e-mail: matthew.foreman@imperial.ac.uk (Cotte et al, 2010;Stallinga & Rieger, 2010;Cole et al, 2011;Mandal et al, 2012;Quirin et al, 2012).…”

Section: Introductionmentioning

confidence: 99%

“…Localization accuracy in localization microscopy is, for example, highly dependent on the assumed point spread function (PSF) used for data fitting. Since the PSF is realistically strongly dependent on system aberrations, such information is key for accurate data analysis and system benchmarking (Cotte et al, 2010;Stallinga & Rieger, 2010;Cole et al, 2011;Mandal et al, 2012;Quirin et al, 2012).…”

Section: Introductionmentioning

confidence: 99%

Phase‐retrieved pupil function and coherent transfer function in confocal microscopy

Foreman

Giusca

Török

et al. 2013

Journal of Microscopy

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Summary This work reports on the retrieval of the pupil function and coherent transfer function of a coherent reflection type confocal microscope from simulated measurements of the intensity point spread function. Two phase retrieval algorithms are presented in this vein, which incorporate the multiple pupil dependence of image formation in confocal microscopy. Verification of the algorithms follows by numerical simulations.

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Application of linear systems theory to characterize coherence scanning interferometry

Cited by 15 publications

References 9 publications

Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics

Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics

Considerations on the proposed linear theory of surface measurement for coherence scanning interferometers

Phase‐retrieved pupil function and coherent transfer function in confocal microscopy

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