Application of molecular force for mass analysis of Krypton/Xenon mixture in low-pressure MEMS gas sensor

Gerdroodbary, M. Barzegar; Mosavat, Mohammad; Ganji, D.D.; Taeibi-Rahni, M.; Moradi, Rasoul

doi:10.1016/j.vacuum.2017.12.042

Cited by 26 publications

(21 citation statements)

References 35 publications

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“…DSMC is a highly-efficient method to solve the Boltzmann equation [ 40 , 41 ]. Moreover, the DSMC method has been widely used in the research of rarefied gas flow induced by temperature field [ 42 , 43 , 44 ] and low-pressure gas actuators based on Knudsen force [ 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 ].…”

Section: Numerical Approachmentioning

confidence: 99%

“…To analyze the flow field characteristics in the device, the authors constructed a two-dimensional (2D) domain model, as shown in Figure 1 b [ 25 ]. Later, Gerdroodbary et al [ 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 ] conducted a lot of research and found that the gas flow was induced by (nonlinear) thermal stress flow, thermal creep flow, and thermal edge flow. Among these three gas flows, the (nonlinear) thermal stress flow plays the main role.…”

Section: Introductionmentioning

confidence: 99%

“…On the other hand, within an ambient pressure of 25 Pa to 1500 Pa, MIKRA can achieve the detection of gases (N 2 –H 2 O, Kr–Xe, He–Ne–Ar, N 2 –H 2 , CH 4 –SO 2 , CO 2 , N 2 –NH 3 , and Air–H 2 ) [ 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 ]. Knudsen force is linearly dependent on the concentration of any gas species in a gas mixture [ 36 ].…”

Section: Introductionmentioning

confidence: 99%

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Impact of Improved Design on Knudsen Force for Micro Gas Sensor

Wang

Zhang

et al. 2020

Micromachines

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Knudsen force generated by thermally driven gas flow in a microscale structure has been used for gas detection and has shown immeasurable potential in the field of microelectromechanical system (MEMS) gas sensors due to its novel sensing characteristics. In this article, the performances of three kinds of Knudsen force gas sensors with improved isosceles triangular shuttle arm structures were studied. In the first design, the top side and right side lengths were equal; in the second, the top side and bottom side lengths were equal; and for the third, the bottom side and right side lengths were equal. A detailed investigation including gas flow, thermal characteristics, Knudsen force, and coupling effects between the shuttle-heater pairs was conducted using the direct simulation Monte Carlo (DSMC) method and the main mechanisms for gas flow presented were almost the same in this work. However, the second design returned the highest Knudsen force performance. The value increased by 42.9% (P = 387 Pa) compared to the Knudsen force of the original square shuttle arm. The results also demonstrate that the coupling effects become weak toward the right with an increase in the number of shuttle-heater pairs.

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Section: Numerical Approachmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Impact of Improved Design on Knudsen Force for Micro Gas Sensor

Wang

Zhang

et al. 2020

Micromachines

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show abstract

“…According to this equation, high Knudsen number is obtained by decreasing either the pressure of the domain or size of our model. Previous studies [8][9][10][11][12][13][14][15][16] clearly showed that the Knudsen force is highly proportional to the main characteristics of the gas inside the domain. Actually, thermal stresses are produced by the non-uniformity of the temperature within rarefied gases and create bulk fluid flows that could employ forces on solid body [17,18].…”

Section: Introductionmentioning

confidence: 99%

“…In our these papers, the main characteristics of this sensor are investigated and the precision of measured Knudsen force for different gas mixtures, for instance, hydrogen, methane/helium, methane/SO 2 , carbon dioxide, ammonia, and inert gas. These researches are conducted to reveal the performance and capability of this micro gas sensor in diverse operating conditions [14][15][16][17][18]. These works have Application of Knudsen Force for Development of Modern Micro Gas Sensors DOI: http://dx.doi.org /10.5772/intechopen.86807 tried to disclose the influence of temperature difference of cold and hot arm, the gap size, and pressure of domain on the value of the exerted force on the cold side.…”

Section: Introductionmentioning

confidence: 99%

Application of Knudsen Force for Development of Modern Micro Gas Sensors

Gerdroodbary¹

2020

Gas Sensors

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Development of new simple gas sensor is highly significant due to its various industrial applications. In this chapter, comprehensive studies on the new micro gas sensor of Micro In-plane Knudsen Radiometric Actuator (MIKRA) are done to evaluate the performance of its technique on the detection of gas. This new micro gas sensor works by the radiometric phenomena, which occurs due to temperature difference in rarefied gas. In order to simulate this micro gas sensor, direct simulation Mont Carlo (DSMC) is recognized as a reliable method. This study highly focused on the main mechanisms of the flow feature and force generation in low-pressure domain. In order to study this micro gas sensor, comprehensive numerical results are thoroughly investigated and the effects of primary factors and parameters are revealed. In addition, the main details of computational approach for the simulation of this micro gas sensor are fully presented. Finally, the performance of this sensor in various operating conditions is explained and main findings are discussed.

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The Design of Low‐Cost Stand‐Alone Microcontroller‐Based Wireless Ultrasonic System for Process Monitoring and Analysis

Keskinoğlu

Aydın

2022

J of Ultrasound Medicine

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Objectives-Ultrasound technology is currently used in many areas, such as imaging, analysis, and process monitoring. The noninvasive implementation, nondestructive effect on the material to be applied, and low cost of the needed components give an advantage to the ultrasonic systems when compared to other methods for analysis and process monitoring studies. However, the current ultrasonic analysis setups used in the studies require additional devices such as a signal generator and oscilloscope. These devices used in the setup increase the cost, size, usage difficulty of the system and, most importantly, decrease the portability and stability. In order to prevent these disadvantages, an ultrasonic system that can work in real-time and its software are developed to be used in analysis and process monitoring without any additional devices. Methods-This system was designed by using a microcontroller. The developed system is portable, has a small size, and a Bluetooth Low Energy connection. It has a battery for using standalone.Results-Therefore, it can be easily used in different small and closed measurement environments such as incubators and controlled remotely. In addition, a mixture was analyzed with both the designed system and a commercial module. When the results are compared, two systems are found highly correlated r 2 ¼ 1 ð Þ:Conclusion-In this study, an embedded ultrasonic measurement system and its software are developed to be used in analysis studies, density measurements, and real-time process monitoring as a stand-alone device.

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Application of molecular force for mass analysis of Krypton/Xenon mixture in low-pressure MEMS gas sensor

Cited by 26 publications

References 35 publications

Impact of Improved Design on Knudsen Force for Micro Gas Sensor

Impact of Improved Design on Knudsen Force for Micro Gas Sensor

Application of Knudsen Force for Development of Modern Micro Gas Sensors

The Design of Low‐Cost Stand‐Alone Microcontroller‐Based Wireless Ultrasonic System for Process Monitoring and Analysis

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