2010 27th International Conference on Microelectronics Proceedings 2010
DOI: 10.1109/miel.2010.5490535
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Application of non-equilibrium plasmas in top-down and bottom-up nanotechnologies and biomedicine

Abstract: In this paper we discuss how a better understanding of thermal and mainly non-thermal plasmas provides basis for their application in a number or nanotechnologies. One should bear in mind that one may design unique properties of plasmas thus affecting very directly properties of the resulting nanostructures. A number of examples where plasmas contribute to production of nanomaterials, modification of surfaces and functionalization at nanoscales are given here. Plasmas are not a panacea but in nanotechnology th… Show more

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