Application of Novel Ultrasonic Cleaning Equipment Using Waveguide mode for Post-Chemical-Mechanical-Planarization Cleaning

Suzuki, Kazunari; Han, Ke; Okano, Shoichi; Soejima, Jyunichiro; Koike, Yoshikazu

doi:10.1143/jjap.48.07gm04

Cited by 4 publications

(4 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…We previously proposed waveguide-type ultrasonic cleaning equipment that uses a quartz glass tube as the ultrasonic irradiator. 4,5) We estimated the acoustic amplitude irradiated from the waveguide side to be over 100 kPa, and we showed that the vibration velocity distribution of the waveguide side had a traveling wave distribution. 6) In a traveling ultrasonic wave field, bubbles receive radiation force in the traveling direction, and this force is expected to prevent the collapse of bubbles trapped at pressure antinodes.…”

Section: Introductionmentioning

confidence: 95%

“…If the inner diameter 2a of the waveguide tube is larger than the wavelength w of ultrasonic waves in water, that is, if a is outside the range that creates a plane wave mode (a 0:3 w ), then some ultrasonic waves are reflected at the waveguide. This reflection creates a waveguide mode 5) that depends on the inner diameter of the waveguide tube, and the waveguide vibrates as a Lamb wave. At the waveguide end, ultrasonic energy is absorbed into the propagation water, and the traveling wave component increases.…”

Section: Waveguide-type Ultrasonic Cleaning Equipmentmentioning

confidence: 99%

See 1 more Smart Citation

Application of Novel Ultrasonic Cleaning Equipment That Uses the Waveguide Mode for the Single-Wafer Cleaning Process

Suzuki¹,

Imazeki²,

Han³

et al. 2011

Jpn. J. Appl. Phys.

Self Cite

View full text Add to dashboard Cite

We present a gauge-invariant and non-perturbative construction of the Glashow-Weinberg-Salam model on the lattice, based on the lattice Dirac operator satisfying the Ginsparg-Wilson relation. Our construction covers all SU(2) topological sectors with vanishing U(1) magnetic flux and would be usable for a description of the baryon number non-conservation. In infinite volume, it provides a gauge-invariant regularization of the electroweak theory to all orders of perturbation theory. First we formulate the reconstruction theorem which asserts that if there exists a set of local currents satisfying cetain properties, it is possible to reconstruct the fermion measure which depends smoothly on the gauge fields and fulfills the fundamental requirements such as locality,gauge-invariance and lattice symmetries. Then we give a closed formula of the local currents required for the reconstruction theorem. JHEP05(2008)095suggested by 't Hooft's anomaly matching condition [5] and so on. Unfortunately, very little is known so far about the actual behavior of chiral gauge theories beyond perturbation theory. It is desirable to develop a formulation to study the non-perturbative aspect of chiral gauge theories.Despite the well-known problem of the species doubling [6 -9], lattice gauge theory can now provide a framework for non-perturbative formulation of chiral gauge theories. The clue to this development is the construction of local and gauge-covariant lattice Dirac operators satisfying the Ginsparg-Wilson relation [10 -15]. By this relation, it is possible to realize an exact chiral symmetry on the lattice [16], without the species doubling problem. It is also possible to introduce Weyl fermions on the lattice and this opens the possibility to formulate anomaly-free chiral lattice gauge theories [17 -29]. In the case of U(1) chiral gauge theories, Lüscher [18] proved rigorously that it is possible to construct the fermion path-integral measure which depends smoothly on the gauge field and fulfills the fundamental requirements such as locality, gauge-invariance and lattice symmetries. Although it is believed that a chiral gauge theory is a difficult case for numerical simulations because the effective action induced by Weyl fermions has a non-zero imaginary part, it would be still interesting and even useful to develop a formulation of chiral lattice gauge theories by which one can work out fermionic observables numerically as the functions of link field with exact gauge invariance. 1 In this article, we construct the SU(2) × U(1) chiral gauge theory of the Glashow-Weinberg-Salam model on the lattice, keeping the exact gauge invariance. As in the case of U(1) theories, we first formulate the reconstruction theorem which asserts that if there exists a set of local currents satisfying cetain properties, it is possible to reconstruct the chiral fermion measure which depends smoothly on the gauge field and fulfills the fundamental requirements such as locality, 2 gauge-invariance and lattice symmetries. 3 We then give a closed expr...

show abstract

Section: Introductionmentioning

confidence: 95%

Section: Waveguide-type Ultrasonic Cleaning Equipmentmentioning

confidence: 99%

Application of Novel Ultrasonic Cleaning Equipment That Uses the Waveguide Mode for the Single-Wafer Cleaning Process

Suzuki¹,

Imazeki²,

Han³

et al. 2011

Jpn. J. Appl. Phys.

Self Cite

View full text Add to dashboard Cite

show abstract

“…Figure 6 shows the breaking of blood clot in an ultrasonic cleaning bath (MRS ultrasonic cleaner DC150H). The bath generates 40 kHz acoustic wave, which is used to clean the glassware and disperse chemicals based on the principle of cavitation [26]. No visible cavitation bubbles are observed because the bubbles are too small and the energy is not focused.…”

Section: Acoustic Field At the Vibration Tipmentioning

confidence: 99%

Development of Piezoelectric Ultrasonic Thrombolysis Device for Blood Clot Emulsification

Kumar

et al. 2012

ISRN Materials Science

View full text Add to dashboard Cite

Ultrasonic thrombolysis is an effective method to treat blood clot thrombus in a blood vessel. This paper reports an OD 5 mm and an OD 10 mm piezoelectric thrombolysis transducers that vibrate longitudinally and generate a pressure field at the distal vibration tip. Studies of vibration mode, pressure field pattern, and cavitation effect were carried out. The transducers were also tested for blood clot emulsification. The results indicate both transducers are effective. The OD 10 mm transducer with a long transmission wire has shown to provide a strong cavitation effect and work effectively at low frequency, high amplitude, and high power conditions. The OD 5 mm transducer was found to operate effectively under higher frequency, low amplitude, and lower power conditions. The cavitation effect is moderate, which facilitates precision and controls over obtaining a more uniform emulsification result.

show abstract

“…When ultrasound is irradiated onto liquid, physical and chemical effects occur due to vibration, cavitation, and streaming. These characteristics of ultrasound are applied to cleaning, [1][2][3] homogenization, atomization 4) and chemical reactions. 5,6) Recently, Li et al 7) have reported that the enzymatic hydrolysis of cellulose is enhanced by ultrasonic irradiation.…”

mentioning

confidence: 99%

Effect of Ultrasonic Frequency on Enzymatic Hydrolysis of Cellulose

Yasuda¹,

Kato²,

Xu³

et al. 2010

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

The effect of ultrasonic frequency on the enzymatic hydrolysis of cellulose was examined. As the cellulose and enzyme, needle unbleached kraft pulp and cellulase were used. In the cases of the horn-type transducer at 20 kHz and the plate-type transducer at 28 kHz, the enzymatic hydrolysis was accelerated by ultrasonic irradiation. Total sugar concentration linearly increased with ultrasonic intensity. On the other hand, in the case of the plate-type transducer at 500 kHz, the enzymatic hydrolysis was inhibited. Total sugar concentration decreased with increasing ultrasonic intensity.

show abstract

Application of Novel Ultrasonic Cleaning Equipment Using Waveguide mode for Post-Chemical-Mechanical-Planarization Cleaning

Cited by 4 publications

References 10 publications

Application of Novel Ultrasonic Cleaning Equipment That Uses the Waveguide Mode for the Single-Wafer Cleaning Process

Application of Novel Ultrasonic Cleaning Equipment That Uses the Waveguide Mode for the Single-Wafer Cleaning Process

Development of Piezoelectric Ultrasonic Thrombolysis Device for Blood Clot Emulsification

Effect of Ultrasonic Frequency on Enzymatic Hydrolysis of Cellulose

Contact Info

Product

Resources

About