Application of oxygen plasma processing to silicon direct bonding

Zucker, O.; Langheinrich, W.; Kulozik, M.; Goebel, H.

doi:10.1016/0924-4247(93)80197-o

Cited by 40 publications

(27 citation statements)

References 7 publications

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“…Since silicone elastomer is extremely hydrophobic, bonding two layers can be difficult. Although oxygen plasma bonding [43] is often used to bond Polydimethylsiloxane (PDMS), attempts to bond Ecoflex using this method were unsuccessful. To achieve good bonding, the patterned layer was kept in the oven at 65°C while the top layer was spin-coated with Ecoflex at low speed (350 rpm), and then for the last 20 seconds at a greater speed (1600 rpm) spreading the Ecoflex as a flat, uniform and very thin layer, thus preventing the channels to be filled in the next step, as shown in previous work [16].…”

Section: Heating First Layer Sensor's Top Layer Curingmentioning

confidence: 99%

A Soft Strain Sensor Based on Ionic and Metal Liquids

et al. 2013

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Abstract-A novel soft strain sensor capable of withstanding strains of up to 100% is described. The sensor is made of a hyperelastic silicone elastomer that contains embedded microchannels filled with conductive liquids. This is an effort of improving the previously reported soft sensors that uses a single liquid conductor. The proposed sensor employs a hybrid approach involving two liquid conductors: an ionic solution and an eutectic gallium-indium alloy. This hybrid method reduces the sensitivity to noise that may be caused by variations in electrical resistance of the wire interface and undesired stress applied to signal routing areas. The bridge between these two liquids is made conductive by doping the elastomer locally with nickel nanoparticles. The design, fabrication, and characterization of the sensor are presented.Index Terms-Wearable sensors, microfluidics, strain measurement, ionic solution, eutectic gallium indium (eGaIn).

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Section: Heating First Layer Sensor's Top Layer Curingmentioning

confidence: 99%

A Soft Strain Sensor Based on Ionic and Metal Liquids

et al. 2013

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“…Zucker et al 22 reported that plasma oxidized silicon wafers formed an ''active'' oxide surface which was strongly hydrophilic. We will therefore assume that the plasmaoxidized surface contains hydrophilic defects.…”

Section: Introductionmentioning

confidence: 99%

Hydrolysis of the amorphous silica surface. I. Structure and dynamics of the dry surface

Wilson

Walsh²

2000

The Journal of Chemical Physics

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A combined molecular dynamics+quantum mechanics method for investigation of dynamic effects on local surface structures Amorphous SiO 2 surfaces are generated from bulk-liquid configurations using simulations employing a polarizable-ion model. The surfaces are characterized in terms of the ion environments as a function of depth into the surface. Comparison is made to previous simulation studies and subtle differences are highlighted and attributed to differences in the potential models. The connectivity of the surface sites is established with a view to investigating the hydrolysis of this surface. Dynamical properties are calculated using a simple projected velocity time correlation function and normal mode analysis and compared to the simulated bulk and experimental bulk and surface spectra.

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“…Usually the gas consists of water or hydrocarbons [28], which at high temperature can only be dissolved in small amounts in the bulk Si or the interfacial oxide layer. Microdefects at the surface then serve as nucleation sites for bubble formation [29], as is frequently observed after oxygen plasma treatment [30]. For this reason, plasma cleaned wafers are often found to be highly covered with voids (b), affecting the local bonding quality.…”

Section: Resultsmentioning

confidence: 99%