Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage

Rezazadeh, Ghader; Tahmasebi, Aminallah; Zubstov, Mikhail

doi:10.1007/s00542-006-0245-5

Cited by 162 publications

(65 citation statements)

References 15 publications

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“…It is worth noting that the static deflection of the CNT under the vdW interaction before applying the DC voltage is calculated using step by step linearization method, Rezazadeh et al (2006), .…”

Section: Solution Of the Governing Equationsmentioning

confidence: 99%

Nonlinear Dynamic Analysis of Electrostatically Actuated Single-walled Carbon Nanotubes Using Nonlocal Elasticity

Fakhrabadi

Rastgoo

Ahmadian

2015

Lat. Am. j. solids struct.

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The paper investigates the effects of application of nonlocal elasticity theory on electromechanical behaviors of single-walled carbon nanotubes under electrostatic actuation. The influences of different dimensions and boundary conditions on the vibration and dynamic instability of the carbon nanotubes are studied, in detail, using this theory. The results reveal that application of the nonlocal elasticity theory leads to the higher pull-in voltages for the nonlocal model applied for carbon nanotubes. Thus, in order to have more accurate results, one should apply nonclassical theorems such as the nonlocal elasticity theory to scrutinize the mechanical and electromechanical behaviors of the nano structures.

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Section: Solution Of the Governing Equationsmentioning

confidence: 99%

Nonlinear Dynamic Analysis of Electrostatically Actuated Single-walled Carbon Nanotubes Using Nonlocal Elasticity

Fakhrabadi

Rastgoo

Ahmadian

2015

Lat. Am. j. solids struct.

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“…In this paper a method is used to solve it, which consists of two steps. In first step, step by step linearization method (SSLM) is applied (Rezazadeh et al 2006) and then, Galerkin method for solving the linear obtained equation is used in each step. For using of SSLM, it is supposed that theŵ k s , is displacement of the beam due to the applied voltage, V k DC .…”

Section: Numerical Solutionmentioning

confidence: 99%

Dynamic characteristics and forced response of an electrostatically-actuated microbeam subjected to fluid loading

et al. 2009

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In this paper flexural vibrations of an electrostatically actuated cantilever microbeam in an incompressible inviscid stationary fluid have been studied. By applying ''Three dimensional aerodynamic theory'' pressure jump across the microbeam has been investigated and the inertial effects of fluid on microbeam dynamics have been modeled as a mass added to microbeam mass. Magnitude of the added mass has been calculated for various aspect ratios of cantilever microbeams and compared with those of clamped-clamped microbeams. To investigate the dynamic characteristics, it has been considered that the microbeam has been deflected by a DC voltage, V DC and then the dynamic characteristics and forced response of the system have been considered about these conditions. Galerkin-based step by step linearization method (SSLM) and Galerkin-based reduced order model have been applied to solve the nonlinear static and dynamic governing equations, respectively. Water by neglecting viscidity effects, as an instant has been considered as a surrounding fluid and the frequency response of the microbeam has been compared with that of vacuum conditions. It has been shown that because of the added mass effects in watery environment, the natural frequencies of the microbeam decrease. Because of the higher dielectric coefficient and increasing electrical stiffness and decreasing total stiffness consequently, maximum amplitude of the microbeam vibrations increases in watery environment, compared with vacuum. Moreover, it has been shown that increasing the DC voltage, increases the electrical stiffness and maximum amplitude of the microbeam vibrations, consequently, It has been shown that in higher voltages (near pull-in voltage), the rate of variation of resonance frequency and maximum amplitude is stronger than lower voltages.

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“…Recently, Rezazadeh et al (2006) have used the piezoelectric material for controlling of the pull-in voltage of electrostatically actuated cantilever and clamped-clamped microbeams by increasing or decreasing of the system stiffness, but they do not investigate the limitations of the magnitude of the applied piezoelectric voltage. However, using of piezoelectric voltage to improve the performance of microstructures leads to create an axial force in the structure.…”

Section: Introductionmentioning

confidence: 99%

Static and dynamic stabilities of a microbeam actuated by a piezoelectric voltage

2009

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In this paper, flutter and divergence instabilities of a cantilever, a clamped-clamped, and a cantilever with intermediate simply-support microbeam sandwiched by piezoelectric layers have been studied. By presenting a mathematical formulation and numerical solution, critical piezoelectric force for avoiding of the instability in a cantilever microbeam has been calculated and validated by known buckling capacity of Beck column. By applying a similar mathematical analysis it has been introduced a critical piezoelectric voltage for a clamped-clamped microbeam. It has been shown that for cantilever microbeams, increasing of the follower piezoelectric force leads to: first flutter and then divergence instabilities whereas in the clamped-clamped microbeams only divergence instability can be occurred. Also effects of the intermediate simply support position on the critical piezoelectric voltage of a cantilever microbeam have been investigated. It has been shown that for case when the intermediate simply support is near to the fixed end of the cantilever increasing of the follower piezoelectric force leads to flutter instability but for case when the intermediate simply support is near to the free end of the cantilever it leads to divergence instability.

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Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage

Cited by 162 publications

References 15 publications

Nonlinear Dynamic Analysis of Electrostatically Actuated Single-walled Carbon Nanotubes Using Nonlocal Elasticity

Nonlinear Dynamic Analysis of Electrostatically Actuated Single-walled Carbon Nanotubes Using Nonlocal Elasticity

Dynamic characteristics and forced response of an electrostatically-actuated microbeam subjected to fluid loading

Static and dynamic stabilities of a microbeam actuated by a piezoelectric voltage

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