Application of self-sensing technique for position control considering vibration suppression in piezo-driven stage

Abstract

This paper presents a position control approach considering vibration suppression using self-sensing techniques in piezoelectric actuators. In order to achieve the high precision positioning using piezoelectric actuators, mechanical vibrations as well as nonlinear properties should be compensated. In this paper, a robust vibration suppression control system against resonant frequency variations is designed, where a minor loop aided by a self-sensing technique is added on the position control system. In the minor loop design, the reduction of sensitivity characteristic at around the vibration frequencies is considered to suppress the residual vibration for the reference and disturbance. Major loop for augmented plant including self-sensing minor loop, on the other hand, is designed by considering system stability and servo characteristic. The proposed approach has been evaluated by experiments using a piezo-driven stage.

An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation

“…(1) A capacitor C pea and a strain-dependent voltage source v δ in series with C pea [15], [32]. For static and quasi-static applications, a leaking resistance R L parallel to C pea , commonly negligible but significant at lower frequency to account for current leak, is added to the schematic [33] (see figure 2b).…”

“…The flow of free electric charges responsible for generating v δ continues until they neutralize the polarization effect. Thus, bridge circuits [21], [32], [37] are often used for strain rate sensing and are effective in suppressing the vibration modes but are not easy to balance for long-term measurements.…”

Self-Sensing Method Considering the Dynamic Impedance of Piezoelectric Based Actuators for Ultralow Frequency

“…Bridge circuits [7,11,12,13] are often used for strain rate sensing and are effective in suppressing the vibration modes but are not easy to balance for long-term measurements. In [14] an antiparallel compensation for the feedthrough with an integrator amplifier to enable a long-term measurement was introduced.…”