In the past, all methods which understand deformation/fracture (D/F) characteristics have been limited on the surface indirectly. D/F characteristics are impacted by nano‐scale structural features like air bubbles (pores); therefore, they need to be analyzed including inside. In this paper, we propose a system which automatically obtains the corresponding relations between pre‐ and post‐D/F pores. Our system enabled analyzing three‐dimensional, local, high‐accuracy D/F characteristics. © 2009 Wiley Periodicals, Inc. Electron Comm Jpn, 91(12): 16–23, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/ecj.10005