2004
DOI: 10.1111/j.0022-2720.2004.01329.x
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Application of the dual‐beam FIB/SEM to metals research

Abstract: SummaryThe dual-beam microscope is a combination of a focused ion beam with an electron beam. The instrument used in this work is also equipped with an energy-dispersive X-ray system for local elemental analysis. This powerful tool gives access to specific features inside a material. Two different applications are presented in this paper: (1) cross-sections and transmission electron microscope specimens cut in order to investigate the interface between an aluminium substrate and its epoxy coating; and (2) a gr… Show more

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Cited by 55 publications
(26 citation statements)
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“…The ion beam slices materials with the spacing of several tens of nanometers, additionally, fiduciary marks are produced as reference points of the image alignment, and the sectioned image taken by the e-beam has a submicron scale of lateral spatial resolution [78,62]. Therefore, the integration of electron and ion beams provides a useful tool for 3D inspection of pore structure, buried defects or metrology [79,80], whereas, the conventional SEM is restricted to 2D surface analysis.…”
Section: Focused Ion Beam/ Scanning Electron Microscopy (Fib/sem)mentioning
confidence: 99%
“…The ion beam slices materials with the spacing of several tens of nanometers, additionally, fiduciary marks are produced as reference points of the image alignment, and the sectioned image taken by the e-beam has a submicron scale of lateral spatial resolution [78,62]. Therefore, the integration of electron and ion beams provides a useful tool for 3D inspection of pore structure, buried defects or metrology [79,80], whereas, the conventional SEM is restricted to 2D surface analysis.…”
Section: Focused Ion Beam/ Scanning Electron Microscopy (Fib/sem)mentioning
confidence: 99%
“…The threedimensional details of the material internal structure (hereafter generically referred to as the material microstructure) are often richly complex and span a multitude of length scales [20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36]. These details play a pivotal role in controlling the material's overall multifunctional performance characteristics.…”
Section: Introductionmentioning
confidence: 99%
“…[6,7] In one study, an epoxy-coated aluminium substrate was milled using FIB (accelerating voltage of 30 keV, ion current of 20 nA) for preparing TEM samples. [14] The paper does not consider possible damage in the residual polymer, however. At least four consequences of the application of FIB for polymer sample preparation are to be addressed in that respect:…”
Section: Introductionmentioning
confidence: 99%