Application of the energy balance method to a nonlinear oscillator arising in the microelectromechanical system (MEMS)

Fu, Yiming; Zhang, Jin; Wan, Liangjiao

doi:10.1016/j.cap.2010.08.037

Cited by 86 publications

(60 citation statements)

References 30 publications

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“…Table 1 shows the comparison of frequency corresponding to various parameters of system with energy balance method (Fu et al, 2011). Figure 5 is the effect of V parameter on nonlinear frequency of electrostatically microbeam base on amplitude.…”

Section: Resultsmentioning

confidence: 99%

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Nonlinear vibration of an electrostatically actuated microbeam

Bayat¹

2014

Lat. Am. j. solids struct.

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In this paper, we have considered a new class of critical technique that called the He's Variational Approach (VA) to solve the nonlinear vibration of an electrostatically actuated microbeam. It has been indicated that the Variational Approach (VA) is quickly convergence and does not demand small perturbation and also sufficiently accurate to both linear and nonlinear problems in engineering. The obtained results show that the approximate solutions are uniformly legitimate on the whole solution field.

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Section: Resultsmentioning

confidence: 99%

“…They used the Euler-Bernoulli beam theory and the Galerkin approach for the MEMS beam model. Fu et al (2011) applied the energy balance method to investigate the nonlinear oscillation problem arising in the MEMS microbeam model. The problem gets complex in large amplitude of vibration and other physical parameters.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear vibration of an electrostatically actuated microbeam

Bayat¹

2014

Lat. Am. j. solids struct.

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“…These double-sided systems are also attractive for detecting ultra-small mass and sensing mechanical forces [3]. Fu et al [2] used the energy balance approach for modeling the oscillation of double-sided microbridges. Ke studied the instability of a double-sided resonator [3].…”

Section: Introductionmentioning

confidence: 99%

“…The double-sided NEMS has recently attracted much attention due to its promising electromechanical performance such as low power consumption, quick response, etc. [1,2]. The double-sided driven scheme has been proposed for the actuation of gyroscopes and memory elements [3,4].…”

Section: Introductionmentioning

confidence: 99%

The size-dependent electromechanical instability of double-sided and paddle-type actuators in centrifugal and Casimir force fields

et al. 2017

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Abstract. The present research is devoted to theoretical study of the pull-in performance of double-sided and paddle-type NEMS actuators fabricated from cylindrical nanowire operating in the Casimir regime and in the presence of the centrifugal force. D'Alembert's principle was used to transform the angular velocity into an equivalent static, centrifugal force. Using the couple stress theory, the constitutive equations of the actuators were derived. The equivalent boundary condition technique was applied to obtain the governing equation of the paddle-type actuator. Three distinct approaches, the DuanAdomian Method (DAM), Finite Di erence Method (FDM), and Lumped Parameter Model (LPM), were applied to solve the equation of motion of these two actuators. This study demonstrates the in uence of various parameters, i.e., the Casimir force, geometric characteristics, and the angular speed, on the pull-in performance.

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“…In a recent study, Fu et al (2011) analyzed the nonlinear oscillation of a double-side micro-resonator subject to electrostatic forces. They found that an increase of the applied voltage difference between the electrode and substrate decreases the oscillating frequency of the system.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear oscillation of nanoelectro-mechanical resonators using energy balance method: considering the size effect and the van der Waals force

Ghalambaz

Edalatifar

2015

Appl Nanosci

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The energy balance method is utilized to analyze the oscillation of a nonlinear nanoelectro-mechanical system resonator. The resonator comprises an electrode, which is embedded between two substrates. Two types of clamped-clamped and cantilever nano-resonators are studied. The effects of the van der Waals attractions, Casimir force, the small size, the fringing field, the mid-plane stretching, and the axial load are taken into account. The governing partial differential equation of the resonator is reduced using the Galerkin method. The energy method is applied to obtain an analytical solution without considering any linearization or small parameter. The results of the present study are compared with the results available in the literature. In addition, the results of the present analytical solution are compared with the Runge-Kutta numerical results. An excellent agreement between the present analytical solution, numerical solution, and the results available in the literature was found. The influences of the van der Waals force, Casimir force, size effect, and fringing field effect on the oscillation frequency of resonators are studied. The results indicate that the presence of the intermolecular forces (van der Waals), Casimir force, and fringing field effect decreases the oscillation frequency of the resonator.In contrast, the presence of the size effect increases the oscillation frequency of the resonator.

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Application of the energy balance method to a nonlinear oscillator arising in the microelectromechanical system (MEMS)

Cited by 86 publications

References 30 publications

Nonlinear vibration of an electrostatically actuated microbeam

Nonlinear vibration of an electrostatically actuated microbeam

The size-dependent electromechanical instability of double-sided and paddle-type actuators in centrifugal and Casimir force fields

Nonlinear oscillation of nanoelectro-mechanical resonators using energy balance method: considering the size effect and the van der Waals force

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