2021
DOI: 10.1063/5.0032306
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Application of the triple Langmuir probe to study local plasma parameters in the radiofrequency discharge that is placed in an additional applied magnetostatic field

Abstract: This paper considers the application of the triple Langmuir probe method to investigate the local plasma parameters of the radio frequency (RF) discharge that is placed in the applied magnetostatic field. The main criteria applicability for such a method for experimental diagnostics of RF plasma parameters is presented. As an example, this paper presents experimental results that were obtained using the proposed method on local plasma parameters in one of the cross sections of the discharge chamber of the RF i… Show more

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Cited by 2 publications
(1 citation statement)
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“…In the 1920s, Langmuir and Mott-Smith proposed a single probe capable of measuring various plasma parameters [2]. For a century, Langmuir probes have become the most important technical means in laboratory and space plasma diagnosis [5][6][7][8][9]. The Langmuir probe is easy to operate, just insert a conductor into the plasma, apply a scanning voltage on the metal electrode with a variable power supply, and measure the current on the electrode to obtain the current-voltage (I-V) characteristics.…”
Section: Introductionmentioning
confidence: 99%
“…In the 1920s, Langmuir and Mott-Smith proposed a single probe capable of measuring various plasma parameters [2]. For a century, Langmuir probes have become the most important technical means in laboratory and space plasma diagnosis [5][6][7][8][9]. The Langmuir probe is easy to operate, just insert a conductor into the plasma, apply a scanning voltage on the metal electrode with a variable power supply, and measure the current on the electrode to obtain the current-voltage (I-V) characteristics.…”
Section: Introductionmentioning
confidence: 99%