Application of twisting algorithm to a 2D electrostatic MEMS micromirror

Abstract

In this paper, a second-order sliding mode control (2-SMC) scheme, called twisting algorithm, is applied to control an electrostatically actuated 2D torsional MEMS micromirror. The proposed twisting algorithm is able to improve the transient and positioning performance of the controlled 2D micromirror including robustness against model uncertainties and external disturbances. The main advantages of the proposed scheme over the first-order SMC are chattering attenuation and enhanced positional accuracy. The closed-loop stability and higher performance of the micromirror under closed-loop control is verified though numerical simulations and experiments.

Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR

“…As a special nonlinear control method, it has been widely used because of its strong robustness and insensitivity to external disturbances. It has been successfully applied to many control fields, especially the field of MEMS-based control; the sliding mode control (SMC) method has proven to be effective [ 21 , 22 , 23 , 24 ]. There are two key points in the design of a sliding mode controller: the first point is to design a sliding mode surface so that the state of the system can reach the sliding mode surface and gradually stabilize in a limited amount of time; the second point is to design a controller to ensure the state of the system can reach the sliding mode surface in a limited time.…”