Application of X-ray mask fabrication technologies to high resolution, large diameter Ta Fresnel zone plates

Ozawa, A.; Tamamura, Toshiaki; Ishii, T.; Yoshihara, Hideo; Kagoshima, T.

doi:10.1016/s0167-9317(96)00202-x

Cited by 46 publications

(26 citation statements)

References 2 publications

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“…In the soft x-ray regime, Fresnel zoneplates enable the possibilities for biological imaging and material science study into sub-10 nm regime [1]. In the past, papers regarding high-resolution zoneplates have mostly focused on optimizing the fabrication process conditions, rarely mentioned the detail of their pattern data preparation algorithm [2,3,4]. In this paper, we focus on the zoneplate pattern generation algorithm which can generate the desired zoneplate pattern and properly render it to a pattern file based on designed optical properties [5].…”

Section: Introductionmentioning

confidence: 99%

Efficient Fresnel zoneplate pattern data preparation for high-resolution nanofabrication

Wang

Miyakawa

Chao

et al. 2017

Optics Communications

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Abstract.A Fresnel zoneplate is a diffractive optical element consisting of concentric rings (zones) for which the transmitted light produces a focal spot that is used in all wavelength regimes, including x-rays. The pattern of transmission openings determines the location of the spot and the sub-half wavelength size of the openings can adjust the intensity. Today, very general transmission zoneplate patterns are used for many special imaging and image compensation purposes. Manufacturing zoneplates require a zoneplate pattern file, which precisely describes the size, shape, and contour of the rings based on the desired optical properties of the lens. Generating such a pattern requires the delicate balance of achieving the required optical performance while maintaining manageable file sizes and computation times. Here we describe a new algorithm meeting these needs. By precisely controlling the number of shapes in each zone, the algorithm simultaneously optimizes the desired optical tolerances with the pattern file size.

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Section: Introductionmentioning

confidence: 99%

Efficient Fresnel zoneplate pattern data preparation for high-resolution nanofabrication

Wang

Miyakawa

Chao

et al. 2017

Optics Communications

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“…In addition to the usual challenges with producing x-ray zone plates, i.e., sub-100-nm high-aspect-ratio periodic patterning, these zone plates need to withstand the high heatload that such high-brightness sources will impose upon the optics. 3,4 Traditionally, high-Z materials, e.g., Ta, 5 Au, 6 Ir, 7 and W 8 have been used for 2 to 12 keV zone plates, but the high heat load can deteriorate the metal or even melt it. Diamond (Di) is considered the optimal zone plate material for such applications due to its high thermal conductivity (2052 W/mK at 300 K) and good optical properties for hard x-rays, i.e., low absorbtion.…”

Section: Introductionmentioning

confidence: 99%

New diamond nanofabrication process for hard x-ray zone plates

Uhlén

Lindqvist

Nilsson

et al. 2011

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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The authors report on a new tungsten-hardmask-based diamond dry-etch process for fabricating diamond zone plate lenses with a high aspect ratio. The tungsten hardmask is structured by electron-beam lithography, together with Cl2/O2 and SF6/O2 reactive ion etching in a trilayer resist-chromium-tungsten stack. The underlying diamond is then etched in an O2 plasma. The authors demonstrate excellent-quality diamond gratings with half-pitch down to 80 nm and a height of 2.6 μm, as well as zone plates with a 75 μm diameter and 100 nm outermost zone width. The diffraction efficiency of the zone plates is measured to 14.5% at an 8 keV x-ray energy, and the imaging properties were investigated in a scanning microscope arrangement showing sub-100-nm resolution. The imaging and thermal properties of these lenses make them suitable for use with high-brightness x-ray free-electron laser sources.

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“…Como exemplo podemos citar a região dos raios-x aonde, nas espessuras requeridas para as lentes, estes materiais seriam capazes de absorver completamente a radiação incidente.É nesta região do espectro que as placas zonais fornecem a maneira mais econômica, simples e eficiente de focalização. As placas de zonas de Fresnel são empregadas em telescópios astronômicos e em microscópios de raios-X [5]. As placas apresentam ainda a vantagem da possibilidade de uso tanto para focalizar um dado comprimento de onda quanto para filtrar radiação indesejada, uma vez que elas focalizam luz de diferentes comprimentos de onda em diferentes distâncias.…”

Section: Introductionunclassified

Um experimento simples usado na produção de placas de zonas de Fresnel

Müller¹,

Silva²,

Fabris³

2005

Rev. Bras. Ens. Fis.

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Neste trabalho propomos um experimento simples que tem por finalidade auxiliar no aprendizado dos fenômenos de interferência e difração da luz. Após uma análise pertinente da teoria de Fresnel da difração, os conhecimentos são aplicados na compreensão do funcionamento das placas de zonas de Fresnel. Apresentamos uma descrição detalhada dos processos usados para a fabricação e caracterização destas placas zonais, o que possibilita a produção de lentes difrativas com a distância focal desejada para um dado comprimento de onda de operação. As placas zonais produzidas e caracterizadas no trabalho atuam como lentes positivas com distâncias focais variando entre 8 e 50 cm para luz visível com comprimentos de onda compreendidos entre 630 e 680 nm de um apontador laser. Palavras-chave: placa de zonas de Fresnel, difração de Fresnel.In this work we present a simple experiment that may be used to help in the learning of interference and diffraction of light. After an analysis of the Fresnel diffraction theory, the concepts are applied in the understanding of the working principle of the Fresnel zone plates. We present a detailed description of the process used in the production and characterization of the devices, allowing making diffractive lenses with the required focal length for a specific wavelength of operation. The zonal plates produced in this work behave like positive lenses with focal lengths in the range from 8 to 50 cm for light with wavelengths from 630 to 680 nm of a laser pointer.

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Application of X-ray mask fabrication technologies to high resolution, large diameter Ta Fresnel zone plates

Cited by 46 publications

References 2 publications

Efficient Fresnel zoneplate pattern data preparation for high-resolution nanofabrication

Efficient Fresnel zoneplate pattern data preparation for high-resolution nanofabrication

New diamond nanofabrication process for hard x-ray zone plates

Um experimento simples usado na produção de placas de zonas de Fresnel

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