se 2024
DOI: 10.57237/j.se.2024.02.001
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Application Progress of Soft Film Nanoimprint Lithography Technology

Yang Zhiwei

Abstract: Soft Film Nanoimprint Lithography (SMNIL) is an emerging nanomanufacturing technology that excels in achieving precise transfer of nanoscale patterns to substrate materials using flexible films as molds. This versatile technology exhibits promising applications in semiconductors, biopharmaceuticals, and optoelectronics owing to its cost-effectiveness, high resolution, and scalability. In semiconductor manufacturing, SMNIL has notably enhanced chip integration and performance. In biomedicine, it is utilized for… Show more

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