Developments in Surface Contamination and Cleaning: Applications of Cleaning Techniques 2019
DOI: 10.1016/b978-0-12-815577-6.00011-6
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Applications of Gas-Phase Cleaning for Removal of Surface Contaminants

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Cited by 2 publications
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“…Fluorine (F) exhibits a unique reactivity and exceptional stability among the periodic elements in that it forms compounds with all naturally occurring elements except He and Ne. Fluoronitrogen (F–N) compounds (F n N m q ) have attracted a great deal of attention in various realms, including high-energy density materials (HEDMs), high-powered lasers, fluorinating agents, , synthetic reactants, etc. The first binary F–N compound, nitrogen trifluoride (F 3 N), was prepared as early as 1903 and has been widely used in the manufacture of flat-panel displays, photovoltaics, light-emitting diodes, and other microelectronics. Later in the mid to late 20th century, a number of F–N compounds with low nitrogen content but high fluorine content ( m ≤ n ) were synthesized or detected in the experiments, mainly including FN, FN + , FN – , F 2 N, F 2 N + , F 2 N – , F 2 N 2 , F 3 N + , F 4 N + , and F 4 N 2 . ,, F 3 N 2 + has been known for a long time, but its solid synthesis was realized in crystal salt [F 3 N 2 ] + [Sb 2 F 11 ] − only very recently in 2022 . On the contrary, very few F–N compounds (F n N m ) with high nitrogen content ( m > n ) have been experimentally characterized, and most of them are still restricted to the theoretical calculations. The well-known nitrogen-rich F–N compounds are open chainlike fluorine azide (FN 3 ) and FN 2 + , which were prepared in 1942 and 1965, respectively. , FN 3 is extremely explosive in its liquid and solid states.…”
mentioning
confidence: 99%
“…Fluorine (F) exhibits a unique reactivity and exceptional stability among the periodic elements in that it forms compounds with all naturally occurring elements except He and Ne. Fluoronitrogen (F–N) compounds (F n N m q ) have attracted a great deal of attention in various realms, including high-energy density materials (HEDMs), high-powered lasers, fluorinating agents, , synthetic reactants, etc. The first binary F–N compound, nitrogen trifluoride (F 3 N), was prepared as early as 1903 and has been widely used in the manufacture of flat-panel displays, photovoltaics, light-emitting diodes, and other microelectronics. Later in the mid to late 20th century, a number of F–N compounds with low nitrogen content but high fluorine content ( m ≤ n ) were synthesized or detected in the experiments, mainly including FN, FN + , FN – , F 2 N, F 2 N + , F 2 N – , F 2 N 2 , F 3 N + , F 4 N + , and F 4 N 2 . ,, F 3 N 2 + has been known for a long time, but its solid synthesis was realized in crystal salt [F 3 N 2 ] + [Sb 2 F 11 ] − only very recently in 2022 . On the contrary, very few F–N compounds (F n N m ) with high nitrogen content ( m > n ) have been experimentally characterized, and most of them are still restricted to the theoretical calculations. The well-known nitrogen-rich F–N compounds are open chainlike fluorine azide (FN 3 ) and FN 2 + , which were prepared in 1942 and 1965, respectively. , FN 3 is extremely explosive in its liquid and solid states.…”
mentioning
confidence: 99%