Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review

Malek, Chantal Khan; Saile, V.

doi:10.1016/j.mejo.2003.10.003

Cited by 238 publications

(120 citation statements)

References 142 publications

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“…To further decrease RLT, the bottom geometry should be flatter. From this point of view, other master fabrication methods, such as X-ray lithography [3][4][5] and UV lithography [6][7][8][9], would be more appropriate than the DRIE method.…”

Section: Resultsmentioning

confidence: 99%

“…Among these, high-aspect-ratio fabrication methods have been OPEN ACCESS developed. These methods include deep-reactive ion etching (DRIE) [1,2], X-ray lithography [3][4][5], UV lithography [6][7][8][9] and laser abrasion [10,11]. Because these fabrication methods provide low-throughput and are not cost-effective, successive molding technologies, such as injection molding, hot embossing and UV imprinting [3,[7][8][9][12][13][14][15][16][17][18][19][20][21][22][23] are required for mass production.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of a Polymer High-Aspect-Ratio Pillar Array Using UV Imprinting

et al. 2013

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This paper presents UV imprinting methods for fabricating a high-aspect-ratio pillar array. A polydimethylsiloxane (PDMS) mold was selected as the UV imprinting mold. The pillar pattern was formed on a 50 × 50 mm 2 area on a polyethylene terephthalate (PET) film without remarkable deformation. The aspect ratios of the pillar and space were about four and ten, respectively. The mold was placed into contact with a UV-curable resin under a reduced pressure, and the resin was cured by UV light irradiation after exposure to atmospheric pressure. The PDMS mold showed good mold releasability and high flexibility. By moderately pressing the mold before UV-curing, the thickness of the residual layer of the imprinted resin was reduced and the pattern was precisely imprinted. Both batch pressing and roll pressing are available.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Fabrication of a Polymer High-Aspect-Ratio Pillar Array Using UV Imprinting

et al. 2013

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“…15 and references cited therein). Figures 1 and 8 show examples of LIGA structures fabricated from Ni-based electrodeposits at Sandia National Laboratories, Livermore (SNL), CA.…”

Section: 1113-15mentioning

confidence: 99%

LIGA-based microsystem manufacturing:the electrochemistry of through-mold depostion and material properties.

Kelly

Goods

2005

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The report presented below is to appear in EEectrochernistry at the Nanoscale, Patrik Schmuki, Ed. Springer-Verlag, (ca. 2005). The history of the LIGA process, used for fabricating dimensional precise structures for microsystem applications, is briefly reviewed, as are the basic elements of the technology. The principal focus however, is on the unique aspects of the electrochemistry of LIGA through-mask metal deposition and the generation of the fine and uniform microstructures necessary to ensure proper functionality of LIGA components. We draw from both previously published work by external researchers in the field as well as from published and unpublished studies from within Sandia.

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“…The pore size distribution of membranes can be measured by several methods (Calvo et al, 1995); among these, the most usual is the Bubble Point (Hernandez and et al, 1996) For pore sizes on the scale of tenths of microns, the Net Filter (Millipore, 2002) presents the best homogeneity in terms of pore size distribution among the available commercial membranes. With the development of micro-machining fabrication techniques (Madou, 2002), however, smooth surface sieves with controlled shape of pores and porosity can be fabricated using Si technology (Tong et al, 2005;Rijn et al, 1999), LIGA technologyLithographie Galvanoformung Abformung (Malek and Saile, 2004;Storkveco Inc, 2009) or Soft Lithography (Madou, 2002;. Besides the homogeneity in the pore sizes and pore distribution, the sieves present a very smooth surface and they can be fabricated with a thickness much smaller than the pore diameter, forming a screen filter (Kuiper et al, 1998).…”

Section: Introductionmentioning

confidence: 99%

Characterization of the selectivity of microsieves using a cross-flow microfiltration system

Gutierrez-Rivera

Katekawa

Silva

et al. 2010

Braz. J. Chem. Eng.

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-Filtration through membranes is a process largely employed in the food and chemical industry to separate particles. Sieves present some advantages in relation to conventional membranes such as high homogeneity in the pore sizes, smooth surfaces, straight-through pores, etc. In this paper we compare the selectivity in the exclusion of particles by size of sieves with circular and slit pores with the same porosity. The selectivity was investigated by filtering a mixture of rutin in water in a cross-flow filtration system. The particle-size distribution of the rutin solution was measured before and after microfiltration. The results showed a high efficiency in the size exclusion of particles for microsieves with circular pores. The filtration through a commercial membrane (net filter) with similar characteristics was also characterized for comparison.

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Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review

Cited by 238 publications

References 142 publications

Fabrication of a Polymer High-Aspect-Ratio Pillar Array Using UV Imprinting

Fabrication of a Polymer High-Aspect-Ratio Pillar Array Using UV Imprinting

LIGA-based microsystem manufacturing:the electrochemistry of through-mold depostion and material properties.

Characterization of the selectivity of microsieves using a cross-flow microfiltration system

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