Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter

Tang, I‐Tseng; Chen, Han-Jan; Hwang, Weng-Sing; Wang, Y.C; Houng, Mau–Phon; Wang, Yeong-Her

doi:10.1016/j.jcrysgro.2003.10.081

Cited by 33 publications

(9 citation statements)

References 8 publications

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“…The piezoelectric properties of ZnO make it ideal for MEMS devices such as acoustic resonators and SAW devices [1][2][3]. ZnO, with its direct wide band gap of 3.37 eV and high exciton binding energy, is promising in optoelectronic applications such as UV light emitters and detectors [4,5].…”

Section: Introductionmentioning

confidence: 99%

Metal-organic chemical vapor deposition of ZnO

Pan

Fenwick

Straßburg

et al. 2006

Journal of Crystal Growth

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Section: Introductionmentioning

confidence: 99%

Metal-organic chemical vapor deposition of ZnO

Pan

Fenwick

Straßburg

et al. 2006

Journal of Crystal Growth

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“…The driving force for the piezoelectric energy harvesting is also the energy conversion effect using piezoelectricity. Up to now, the piezoelectric effect, which is an energy conversion phenomena leading to the electrical energy generated by an applied force and a mechanical deformation by an applied electric field, have been extensively utilized to demonstrate various devices, such as transducers [1,2], sensors [3][4][5], actuators [6,7], surface acoustic wave (SAW) devices [8,9], frequency control, etc [10]. In the past decade, piezoelectric energy harvesting technologies have been intensively investigated in various research…”

Section: Introductionmentioning

confidence: 99%

Recent Progress on PZT Based Piezoelectric Energy Harvesting Technologies

et al. 2016

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Abstract:Energy harvesting is the most effective way to respond to the energy shortage and to produce sustainable power sources from the surrounding environment. The energy harvesting technology enables scavenging electrical energy from wasted energy sources, which always exist everywhere, such as in heat, fluids, vibrations, etc. In particular, piezoelectric energy harvesting, which uses a direct energy conversion from vibrations and mechanical deformation to the electrical energy, is a promising technique to supply power sources in unattended electronic devices, wireless sensor nodes, micro-electronic devices, etc., since it has higher energy conversion efficiency and a simple structure. Up to now, various technologies, such as advanced materials, micro-and macro-mechanics, and electric circuit design, have been investigated and emerged to improve performance and conversion efficiency of the piezoelectric energy harvesters. In this paper, we focus on recent progress of piezoelectric energy harvesting technologies based on PbZr x Ti 1´x O 3 (PZT) materials, which have the most outstanding piezoelectric properties. The advanced piezoelectric energy harvesting technologies included materials, fabrications, unique designs, and properties are introduced to understand current technical levels and suggest the future directions of piezoelectric energy harvesting.

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“…One of the main purposes of this work was to check the influence of the grain size on the quality of the resonator spectral signature and to evaluate the possibility to fabricate high frequency sources along this approach. Considering the results found in the literature [6], [7] and others from a previous work [8], a simple material combination has been considered in that purpose, i.e. Zinc Oxyde (ZnO) deposited using sputtering technique on Nanocrystalline diamond (NCD) layers grown along different techniques based on Microwave Plasma assisted Chemical Vapor Deposition (MPCVD).…”

Section: Introductionmentioning

confidence: 99%

Fabrication of a 3GHz oscillator based on Nano-Carbon-Diamond-film-based guided wave resonators

Salut

Gesset

Martin

et al. 2013

Microelectronic Engineering

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International audienceWe have investigated the possibility to use carbon-diamond layers exhibiting nano-sized grains for the fabrication of SAW resonators. One of the main purpose was to check the influence of the grain size on the resonator's spectral signature and to evaluate the fabrication of high frequency sources along this approach. We have investigated various material combinations on Nano-Carbon-Diamond (NCD) layers grown along different techniques (nano-seeding, BEN, followed by MPCVD). The best configuration was based on ZnO/NCD material combination provided the piezoelectric layer was deposited on the so-called nucleation surface of the NCD. Numerous resonators have been fabricated on such substrates, allowing to characterize and exploit the resonance near 3 GHz. An oscillator then was built using such a configuration: its stability has been measured near 10-7 and its phase noise was found near −100 dBc.Hz-1 at 10 kHz

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Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter

Cited by 33 publications

References 8 publications

Metal-organic chemical vapor deposition of ZnO

Metal-organic chemical vapor deposition of ZnO

Recent Progress on PZT Based Piezoelectric Energy Harvesting Technologies

Fabrication of a 3GHz oscillator based on Nano-Carbon-Diamond-film-based guided wave resonators

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