Applications of the ‘CATGIXRF’ computer program to the grazing incidence X‐ray fluorescence and X‐ray reflectivity characterization of thin films and surfaces

Abstract

Grazing incidence x‐ray fluorescence (GIXRF) analysis technique has the potential of being one of the most powerful and versatile methods for characterization of layered materials, as it combines features of both x‐ray reflectivity (XRR) and x‐ray fluorescence techniques. GIXRF technique allows non‐destructive evaluation of layer thickness, interface roughness, interlayer formation and depth profiling for an impurity element inside a layer medium or in the substrates. A computer program ‘CATGIXRF’, has been developed for GIXRF characterization of thin film and surfaces. Methodology of the program and its various features has been discussed in detail. The program offers analysis of GIXRF and XRR data simultaneously. The utility of the program has been demonstrated by example calculations and by providing a few examples of XRR and GIXRF characterization of a variety of thin‐layered materials. Copyright © 2009 John Wiley & Sons, Ltd.

Influence of Interlayer Interfaces on Exchange Coupling Efficiency in Multilayer Magnetoresistive Films With Fe₅₀Mn₅₀ Layers

“…It was found that in single layer sample the normalized angular dependences of emission intensities of Mn and Fe are shifted one with respect to the other by value of ∼0.01°. This fact is interpreted as an increase of the Mn content toward the surface of the film [13]. In the sample with Ta layer, such shift of the emission intensities of Mn and Fe was not detected, indicating homogeneity of the chemical composition through the thickness of the film.…”

Combination of grazing incidence x-ray fluorescence with x-ray reflectivity in one table-top spectrometer for improved characterization of thin layer and implants on/in silicon wafers

“…6, 7 GIXRF attracts new attention nowadays, as technologically highly relevant materials with thicknesses of few nanometres are now manufactured. In 2010, Tiwari et al 8 published the application of combined XRR and GIXRF measurements for the investigation of thin films and multilayered materials.…”

High-energy-resolution grazing emission X-ray fluorescence applied to the characterization of thin Al films on Si

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