Aqueous sol-derived ferroelectric thin films of PbTiO3 directly on Si(100) substrate

Palkar, V. R.; Purandare, S. C.; Poonawala, N.; Apte, P. R.; Pinto, R.; Multani, M.S.

doi:10.1016/s0025-5408(97)00027-5

Cited by 7 publications

(19 citation statements)

References 7 publications

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“…Therefore, it appears that there is a preferential texturing of the grains along the (101) (or (011)) direction in this film. This is further corroborated by the x-ray diffraction results from aqueous sol derived PbTiO 3 films crystallized at temperatures of 600 and 700 • C, presented in an earlier paper [7], wherein the perferential (101) + (110) texture is also observed.…”

Section: Resultssupporting

confidence: 81%

“…Thus, ferroelectric thin films of PbTiO 3 were directly prepared on Si(100) substrates for the first time by spin coating an aqueous sol containing lead and titanium hydroxy complexes and subsequently annealing at different temperatures. The authors reported that the ferroelectric properties of these sol processed films were comparable to those obtained by the complex alkoxide route and other expensive techniques [7].…”

Section: Introductionmentioning

confidence: 58%

“…This understanding is important since it has direct ramifications on the ferroelectric and varistor properties of these films. After spin coating the film containing the hydroxy complex is amorphous in nature and is in direct contact with the Si(100) substrate [7]. Decomposition of the hydroxy complex and consequent crystallization of the film is carried out by annealing it in a furnace at elevated temperatures.…”

Section: Discussionmentioning

confidence: 99%

“…The ferroelectric PbTiO 3 thin films have been prepared using an aqueous sol route. The details of the process are discussed elsewhere [7]. In the process, sol made up of ultrafine particles of the hydroxy complex in aqueous medium is deposited directly on Si(100) substrates by spin coating.…”

Section: Methodsmentioning

confidence: 99%

“…Other studies on solgel processing include using lead acetylacetonate as the lead precursor, which decomposes and crystallizes into PbTiO 3 [5], and using lead acetate trihydrate and titanium isopropoxide in a solvent of 2-methoxy propanol [6]. Palkar et al [7] have developed a novel aqueous sol route for the deposition of PbTiO 3 thin films which simplifies the chemical processing and also avoids the use of dangerous chemicals. Thus, ferroelectric thin films of PbTiO 3 were directly prepared on Si(100) substrates for the first time by spin coating an aqueous sol containing lead and titanium hydroxy complexes and subsequently annealing at different temperatures.…”

Section: Introductionmentioning

confidence: 99%

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Microstructural studies of aqueous sol derived ferroelectric PbTiO₃thin films

Bannerjee

Purandare

Palkar

et al. 2000

J. Phys.: Condens. Matter

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Aqueous sol derived ferroelectric PbTiO 3 thin films have been deposited on Si(100) substrates. Films crystallized by annealing at 675 • C, which exhibit the best ferroelectric properties and also excellent varistor-type behaviour, have been investigated in detail by TEM and x-ray diffraction. There is a partially preferred orientation of the crystallized grains of the perovskite phase along the (110) and (101) directions. During annealing, Si from the substrate diffuses into the films and forms an amorphous Si-O rich phase at the boundaries of the equiaxed grains of the perovskite phase. The formation of this amorphous phase is expected to increase the resistivity of the grain boundaries and consequently promote varistor-type behaviour. Domains were observed within the equiaxed grains and they exhibited a needle-like morphology. In a single grain, either a set of parallel domains or two sets of differently oriented parallel domains were observed. With increased diffusion of Si from the substrate, the fraction of the amorphous phase in the microstructure increased. The amorphous phase penetrated the domain boundaries within a single grain, eventually isolating the needle-like domains. The resulting microstructure consisted of needles of the perovskite phase in an amorphous matrix.

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Section: Resultssupporting

confidence: 81%

Section: Introductionmentioning

confidence: 58%

Section: Discussionmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%