“…Moreover, the presence of interstitial Fˉ would also increase the lattice disorder remarkably [22,29,43], decreasing the chemical stability of electrode. In fact, many reports about F-doped SnO 2 film as TCO have used a range of analytical tools to verify that proper Fˉ doping in the enormous O vacancies of SnO 2 lattice increased carrier concentrations and thus decreased the sheet resistance [22,26,44]; however, excess F doping, residing in interstitial sites at the grain boundary region or in dopant clusters, could hinder the electron transport through the grain boundary and increase carrier scattering, thus causing the increase of the resistivity [29,32,42,43].…”