Ar Lowest Excited State Densities in Ar and Ar–Hg Hot Cathode Discharge

Yuasa, Kunio; Yamashina, Kazue; Sakurai, Tsunehisa

doi:10.1143/jjap.36.2340

Cited by 8 publications

(4 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The diode laser induced fluorescence was previously used for analytical purposes [45][46][47][48][49][50][51]. Combined with absorption measurements, it can provide spatially resolved absolute densities of species and temperature in the plasma.…”

Section: Relevance To Plasma Processing Of Materialsmentioning

confidence: 99%

Determination of gas temperature and thermometric species in inductively coupled plasmas by emission and diode laser absorption

Bol’shakov

Cruden²,

Sharma³

2004

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

A vertical cavity surface-emitting laser diode (VCSEL) was used as a spectrally tunable emission source for measurements of the radial-integrated gas temperature inside an inductively coupled plasma reactor. The data were obtained by profiling the Doppler-broadened absorption of metastable Ar atoms at 763.51 nm in argon and argon/nitrogen plasmas (3%, 45%, and 90% N 2 in Ar) at pressures of 0.5-70 Pa and inductive powers of 100 and 300 W. The results were compared to the rotational temperature derived from the N 2 emission at the (0,0) vibrational transition of the C 3 u -B 3 g system. The differences in integrated rotational and Doppler temperatures were attributed to non-uniform spatial distributions of both temperature and thermometric species (Ar * and N * 2 ) that varied depending on the conditions. A two-dimensional, three-temperature fluid plasma simulation was employed to explain these differences. This work should facilitate further development of a miniature sensor for non-intrusive acquisition of data (temperature and densities of multiple plasma species) during micro-and nano-fabrication plasma processing, thus enabling diagnostic-assisted continuous optimization and advanced control over the processes. Such sensors would also enable us to track the origins and pathways of damaging contaminants, thereby providing real-time feedback for adjustment of processes. Our work serves as an example of how two line-of-sight integrated temperatures derived from different thermometric species make it possible to characterize the radial non-uniformity of the plasma.

show abstract

Section: Relevance To Plasma Processing Of Materialsmentioning

confidence: 99%

Determination of gas temperature and thermometric species in inductively coupled plasmas by emission and diode laser absorption

Bol’shakov

Cruden²,

Sharma³

2004

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…The extensive literature that exists on this subject is concerned with theoretical and experimental studies on the CR in low pressure gas discharge lamps with mercury as carrier gas [1][2][3] and on Grimm-type glow discharges in argon [4][5][6][7][8][9][10] and helium [11]. Only a limited number of investigations studied hot cathode glow discharges and especially the gas temperature in the vicinity of the cathode [12]. The gas temperature is an important parameter, which characterizes the thermal energy of all neutral particles in the discharge tube.…”

Section: Introductionmentioning

confidence: 99%

Gas temperature in the cathode region of a dc glow discharge with a thermionic cathode

Winter

Lange

Golubovskiǐ

2008

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

The gas temperature in the cathode region of a low pressure dc He–Xe glow discharge in spot mode is determined from the Doppler broadened line profile of the xenon 1s5–2p6 transition (823.16 nm), which is obtained by means of a laser atom absorption spectroscopy. The inhomogeneous temperature distribution in the radial direction has to be taken into consideration. In order to model the gas temperature distribution the heat balance equation is solved. The comparison of the experimental and theoretical temperature profiles shows good agreement.

show abstract

“…The diode laser induced fluorescence was previously used for analytical purposes. [10][11][12][13] Combined with absorption measurements, it can provide spatially resolved absolute densities of species and temperature in the plasma. The plasma chamber should then incorporate three windows (one for the diode laser and two for detection photodiodes).…”

Section: Resultsmentioning

confidence: 99%

“…Calibration at the absolute scale follows directly from the Beer-Lambert law. The diode laser induced fluorescence [10][11][12][13] can be simultaneously recorded, which adds three-dimensional resolution.…”

Section: Continuous-wave Cavity Ring-down Spectroscopymentioning

confidence: 99%

Sensor for monitoring plasma parameters

2004

View full text Add to dashboard Cite

A spectrally tunable VCSEL (vertical cavity surface-emitting laser) was used as part of sensing hardware for measurements of the radial-integrated gas temperature inside an inductively coupled plasma reactor. The data were obtained by profiling the Doppler-broadened absorption of metastable Ar atoms at 763.51 nm in argon and argon/nitrogen plasmas (3, 45, and 90% N2 in Ar) at pressure 0.5-70 Pa and inductive power of 100 and 300 W. The results were compared to rotational temperature derived from the N2 emission at the (0,0) transition of the C - B system. The differences in integrated rotational and Doppler temperatures were attributed to non-uniform spatial distributions of both temperature and thermometric species (Ar* and N2*) that varied depending on conditions. A two-dimensional, two-temperature fluid plasma simulation was employed to explain these differences. This work should facilitate further development of a miniature sensor for non-intrusive acquisition of data (temperature and densities of multiple plasma species) during micro- and nano-fabrication plasma processing, thus enabling the diagnostic-assisted continuous optimization and advanced control over the processes. Such sensors would also enable tracking the origins and pathways of damaging contaminants, thereby providing real-time feedback for adjustment of processes. Our work serves as an example of how two line-of-sight integrated temperatures derived from different thermometric species make it possible to characterize the radial non-uniformity of the plasma.Comment: Presented at the Photonics West conference, Lasers and Applications in Science and Technology, San Jose, CA, January 2004. This version gives a more detailed introduction on diode lasers as diagnostic tool for micro/nano-fabrication. A follow-up paper published in Plasma Sources Sci. Technol., v.13, 691-700 (2004) featured improvements in plasma simulatio

show abstract

Ar Lowest Excited State Densities in Ar and Ar–Hg Hot Cathode Discharge

Cited by 8 publications

References 8 publications

Determination of gas temperature and thermometric species in inductively coupled plasmas by emission and diode laser absorption

Determination of gas temperature and thermometric species in inductively coupled plasmas by emission and diode laser absorption

Gas temperature in the cathode region of a dc glow discharge with a thermionic cathode

Sensor for monitoring plasma parameters

Contact Info

Product

Resources

About