Arc-enhanced glow discharge in vacuum arc machines

Vetter, J.; Burgmer, W.; Perry, A.J.

doi:10.1016/0257-8972(93)90074-x

Cited by 39 publications

(13 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…2 , the ta-C film thickness should be less than 2 nm and the roughness well below 1 nm. Atomic force microscopy (AFM) showed that the surface roughness of filtered ta-C is almost constant at about 0.12 nm [66] and likely related to the roughness of the substrate surface.…”

Section: Tetrahedral Amorphous Carbon (Ta-c)mentioning

confidence: 99%

“…In order to further increase the density of stored information, which currently already exceeds 100 Gbit/in. 2 , the ''magnetic spacing'' between storing layer and read-write head needs to be reduced as much as possible. If we consider a typical 10.2 Nitride Coatings for Wear Applications hard disk situation, the magnetic spacing includes the magnetically dead layer formed at the interface between protective coating and magnetic material, the protective coatings of head and disk, a lubricant layer on the disk, and the flying height of the slider (head carrier).…”

Section: Tetrahedral Amorphous Carbon (Ta-c)mentioning

confidence: 99%

“…Arc coating machines were built in large numbers, and the development of macroparticle filters followed just a few years later. With the introduction of this technology to the West, TiN became quickly popular for both tool and decorative coatings applications [1,2] Even today, some research and development efforts are still concerned with this material and its deposition techniques. Macroparticle filters are often involved when improving TiN, such as the classic 908 filter [3] or the Venetian blind filter [4].…”

Section: Tin and Other Binary Nitridesmentioning

confidence: 99%

See 2 more Smart Citations

Some Applications of Cathodic Arc Coatings

Anders

2008

Cathodic Arcs

View full text Add to dashboard Cite

Section: Tetrahedral Amorphous Carbon (Ta-c)mentioning

confidence: 99%

Section: Tetrahedral Amorphous Carbon (Ta-c)mentioning

confidence: 99%

Section: Tin and Other Binary Nitridesmentioning

confidence: 99%

See 1 more Smart Citation

Some Applications of Cathodic Arc Coatings

Anders

2008

Cathodic Arcs

View full text Add to dashboard Cite

“…Argon was selected as the working gas for its wide use in stabilizing cathodic arcs [1,[16][17][18][19][20]. The gas flow was provided to the coil side that is remote relative to the extraction grids, as shown in Fig.…”

Section: Experimental Set-upmentioning

confidence: 99%

Measurements of the Ion Species of Cathodic Arc Plasma in an Axial Magnetic Field

Окс

Anders

2011

IEEE Trans. Plasma Sci.

View full text Add to dashboard Cite

USAAbstract-Metal and gas ion species and their charge state distributions were measured for pulsed copper cathodic arcs in argon background gas in the presence of an axial magnetic field. It was found that changing the cathode position relative to anode and ion extraction system as well as increasing the gas pressure did not much affect the arc burning voltage and the related power dissipation. However, the burning voltage and power dissipation greatly increased as the magnetic field strength was increased. The fraction of metal ions and the mean ion charge state were reduced as the discharge length was increased. The observations can be explained by the combination of charge exchange collisions and electron impact ionization.They confirm that previously published data on characteristic material-dependent charge state distributions (e.g. Anders and Yushkov, J. Appl. Phys., vol.91, pp. [4824][4825][4826][4827][4828][4829][4830][4831][4832] 2002) are not universal but valid for high vacuum conditions and the specifics of the applied magnetic fields.

show abstract

“…Firstly, Ti-containing DLC deposited on stainless steel plates has recorded values of resistivity under 10 mΩ-cm. However, Ti-C:H films exhibit insufficient corrosion resistance of over 10 μA/cm 2 for the passivation region in solutions of sulfuric acid used to simulate the PEMFC environment [8] [9] [10] [11]. The Cr-C:H has excellent resistance against corrosion and therefore displays low corrosion current values even in sulfuric acid solutions.…”

Section: Introductionmentioning

confidence: 99%

The Effect of Nitrogen Gas Flow Rate on the Cr-Containing DLC (Diamond-Like Carbon) Coating by AEGD Hybrid-CVD Coating Process

Cho¹,

Lee²,

Okumiya³

et al. 2017

AMPC

View full text Add to dashboard Cite

The development of electric and hybrid automobiles has gained momentum with the growth of interest in the field of miniaturization of electrode materials. In particular, technologies that improve the electrical property of stainless steel, while maintaining corrosion resistance, are gaining interest in terms of maintaining specific resistivity. The study on metal doping in diamond-like carbon coating is currently in progress to enhance the characteristics of conductivity and corrosion resistance with excellent properties such as corrosion resistance and lubrication coating. It is the process of using Cr arc with DLC coating to actuate AEGD. The change of I(D)/I(G) (Graphite peak (G) and disordered bond peak (D)) ratio and G-peak position in Cr-containing DLC film causes graphitization and thus lowers the basic electric resistance. Simultaneous input of nitrogen gas leads to deposition of CrN by a specific ratio of Cr and N in the DLC coating, and the nitrogen atoms replace hydrogen in bonding to increase the sp 3 bond structure in the DLC film, in which CrN is not deposited, to result in specific resistivity of a specific value or less.

show abstract

Arc-enhanced glow discharge in vacuum arc machines

Cited by 39 publications

References 2 publications

Some Applications of Cathodic Arc Coatings

Some Applications of Cathodic Arc Coatings

Measurements of the Ion Species of Cathodic Arc Plasma in an Axial Magnetic Field

The Effect of Nitrogen Gas Flow Rate on the Cr-Containing DLC (Diamond-Like Carbon) Coating by AEGD Hybrid-CVD Coating Process

Contact Info

Product

Resources

About