The compositions of SF 6 arc plasma are contaminated by Cu vapor through electrode erosion and thus affect the performance of the high-voltage SF 6 circuit breaker. But the essential data for chemical kinetic models to study the non-equilibrium compositions of SF 6 /Cu mixtures, namely the decomposition mechanism of SF 6 /Cu mixtures, is still not clear. Besides, SF 6 decomposition products can be used to diagnose insulation faults of GIS and to evaluate the electric life of the SF 6 circuit breaker, but the uncertainty of the decomposition mechanism of SF 6 /Cu mixtures hinders the application of the analysis method of SF 6 decomposition products. Therefore, this work is devoted to investigating the decomposition mechanism of SF 6 /Cu mixtures by means of density functional theory in conjunction with 6-311G(d,p) basis set (for S and F atoms) and Lanl2DZ basis set (for the Cu atom). The optimized molecular structures, harmonic vibrational frequencies and energetic information of reactants, intermediate products (IM), transition states (TS) and products are thoroughly studied. And the complete decomposition pathways of SF 6 /Cu mixtures involving 15 reactions are derived. Detailed potential energy surfaces of SF 6 + Cu decomposition reactions are also depicted as a result. Among all the decomposition pathways, the favorable decomposition reactions of SF 6 + Cu mixtures are found: reaction R1 contributes more than reaction R2 in the decomposition of SF 6 + Cu mixtures due to its lower energy released; reaction R3 is dominant in the decomposition of SF 5 + Cu other than multi-step reactions; the chemical processes of SF 4 + Cu → IM x → TS y (where x stands for 9, 10 and 13, and y denotes 7, 8 and 9) may play the same role in SF 4 + Cu decomposition, but the reaction rate of R6 is higher than other reactions; reaction R9 and R11 are relative favorable among SF 3 + Cu decomposition reactions; reaction R13 is dominant in the decomposition of SF 2 + Cu because of its high potential well. This work hopes to outline a theoretical basis to investigate the non-equilibrium compositions of SF 6 /Cu arc plasma and the SF 6 decomposition products analysis method.