“…Due to this synthetic limitation, few mechanistic studies regarding Si/sulfide electrolyte interfaces are reported, even in thin-film systems. Cathodic arc plasma deposition (CAPD) is categorized as a physical vapor deposition technique. , During CAPD, the target material is converted to plasma via arc discharge, and the generated plasma is fully ionized with very energetic ions. The energetic condensation of ions on the substrate from the cathodic arc plasma promotes the formation of flat, dense, well-adherent films. , Furthermore, the immobilization of the deposited species, owing to rapid energy loss, may suppress atomic diffusion into the substrate bulk .…”