Are ambient SO 2 levels a valid indicator of projected acid gas filter life?

Dallas, Andrew J.; Ding, Lefei; Joriman, Jon; Hoang, Brian; Parsons, Jonathan G.; Seguin, Kevin

doi:10.1117/12.534102

Cited by 3 publications

(2 citation statements)

References 14 publications

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“…Significant reductions of NO x were observed upon exposure of these medias to approximately 500 ppbv NO x . 12,16 Los Alamos National Lab (LANL) has shown that fuel cell life and power can be significantly improved using our AGR media when exposed to 5.0 ppmv of NO 2 . 12 IMEC and DIONEX have combined to show that in 193 nm Lithography applications our AGR filters are effective at reducing SO 2 levels from ~1.0 ppbv to <5.0 pptv (>99.5% efficiency), NO from ~2.0 ppbv to 25 pptv (98.5% efficiency), while maintaining NO 2 levels below 10 pptv.…”

Section: Packed Bed Filter Breakthrough Testingmentioning

confidence: 98%

Removal of low concentrations of acid gases: issues and solutions

et al. 2005

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Part per billion concentrations of acid gases such as SO x and NO x have been detected in both high purity gases and CDA lines. These contaminants can have deleterious effects on a number of high purity applications such as the optics found in lithography equipment steppers, scanners, and inspection tools. In addition, acidic gases have also been shown to reduce the life of masks and reticles, decrease fuel cell output due to catalyst poisoning, and cause hard disk drive crashes due to surface contamination and corrosion. Consequently, acid gas control in these applications has become a critical part of the required filtration system. SO x concentrations are typically used as the baseline for acid gas filter exposure guidelines and performance testing. However, this approach has been shown to provide poor filter life predictions, which has been attributed to the presence of other acidic and organic contaminants that compete with SO x for the available adsorption sites. Equally important, the type of sorbents and methods used to control acid gases can significantly affect the ability to remove SO x . In this work we will compare the performance of various sorbents, structures, and methods for the removal of SO x and NO x .

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Section: Packed Bed Filter Breakthrough Testingmentioning

confidence: 98%

Removal of low concentrations of acid gases: issues and solutions

et al. 2005

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“…Over the years, the AMC contaminants of greatest concern in photolithography applications have changed dramatically. Since the early 1990s the focus of AMC filtration has ranged from ammonia (NH3), 1,2 n-methyl-2-pyrrolidinone (NMP), 3,4 amines, 5 sulfur dioxide (SO2) 6 and acid gases in general, 7 to siloxanes (HMDS, HMDSO, and TMS). 8,9 The issues associated with these contaminants have ranged from photoresist issues (e.g.…”

Section: Introductionmentioning

confidence: 99%

An investigation of perfluoroalkylamine contamination control

Dallas

Zastera

2009

Metrology, Inspection, and Process Control for Microlithography XXIII

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Perfluoroalkylamine (PFAA) contamination has been observed to be a growing contamination issue in semiconductor fabs due to the increased tolerances demanded by next generation lithography processes. These contaminants are found within the cleanroom, process environments and within various tools and enclosures. As a result, effective control of PFAAs in lithographic processing and other critical environments are becoming an important filtration problem. This work was undertaken to evaluate filter performance for the removal of PFAAs and to provide an optimal filtration solution. The filter breakthrough performance of perfluorotributylamine (PFTBA), a common heat transfer fluid, is investigated over a range of environmental conditions for several commercially available adsorbent materials. The results from these accelerated tests indicate that PFAAs can be effectively removed with activated carbon-based chemical filters.

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An integrated micro-chip with Ru/Al2O3/ZnO as sensing material for SO2 detection

Liu

Chen

et al. 2018

Sensors and Actuators B: Chemical

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Are ambient SO 2 levels a valid indicator of projected acid gas filter life?

Cited by 3 publications

References 14 publications

Removal of low concentrations of acid gases: issues and solutions

Removal of low concentrations of acid gases: issues and solutions

An investigation of perfluoroalkylamine contamination control

An integrated micro-chip with Ru/Al2O3/ZnO as sensing material for SO2 detection

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