Area scanning method for 3D surface profilometry based on an adaptive confocal microscope

Luo, Daming; Taphanel, Miro; Claus, Daniel; Boettcher, T.; Längle, Thomas; Beyerer, Jürgen

doi:10.1016/j.optlaseng.2019.105819

Cited by 13 publications

(5 citation statements)

References 22 publications

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“…Therefore, the axial position of the slide along the ye arrow was fixed. At this axial position, θ, a, and h0 were each measured first, and th was calculated through Equation (12), which was 19.1°. The other parameters in Equa (18) are listed in Table 3.…”

Section: Thickness Measurement For Transparent Specimenmentioning

confidence: 99%

“…In 2015, Hillenbrand M et al [11] presented a chromatic confocal matrix sensor with actuated pinhole arrays for 3D object snapshot acquisition, which significantly improved the lateral resolution by applying pinhole arrays. In 2020, Luo D et al [12] proposed a direct area scanning method for 3D surface profilometry based on a tilted focal field. The tilting angle was specifically chosen according to the numerical aperture of the system.…”

Section: Introductionmentioning

confidence: 99%

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Thickness Measurement for Glass Slides Based on Chromatic Confocal Microscopy with Inclined Illumination

Zhang

Shang

et al. 2021

Photonics

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Chromatic confocal microscopy is a widely used method to measure the thickness of transparent specimens. In conventional configurations, both the illumination and imaging axes are perpendicular to the test specimen. The reflection will be very weak when measuring high-transparency specimens. In order to overcome this limitation, a special chromatic confocal measuring system was developed based on inclined illumination. This design was able to significantly improve the signal-to-noise ratio. Compared with conventional designs, the proposed system was also featured by its biaxial optical scheme, instead of a coaxial one. This biaxial design improved the flexibility of the system and also increased the energy efficiency by avoiding light beam splitting. Based on this design, a prototype was built by the authors’ team. In this paper, the theoretical model of this specially designed chromatic confocal system is analyzed, and the calculating formula for the thickness of transparent specimen is provided accordingly. In order to verify its measurement performance, two experimental methodology and results are presented. The experimental results show that the repeatability is better than 0.54 μm, and the axial measurement accuracy of the system could reach the micron level.

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Section: Thickness Measurement For Transparent Specimenmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Thickness Measurement for Glass Slides Based on Chromatic Confocal Microscopy with Inclined Illumination

Zhang

Shang

et al. 2021

Photonics

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“…Therefore, in recent years, the development direction of chromatic confocal systems has shifted from stage-scanning to platform-free full-field measurement to avoid the above problems. Most full-field chromatic confocal systems are based on multipoint scanning [2][3][4][5][6][7]. However, the current multipoint scanning development has some crucial disadvantages, such as low optical efficiency and the trade-off between the wavelength resolution and the measurement speed.…”

Section: Introductionmentioning

confidence: 99%

Galvo-Scanning Chromatic Confocal Microscopy for High-Speed 3-D Surface Measurement

Chen¹,

Chou²,

Fang³

et al. 2022

Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022)

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“…Generally, the intensity of the light reflected from metal surfaces, which is commonly used in laser processes, is available as a function of wavelength and illumination angle (α) [5]. However, these results apply only to specular reflection [6], which is rarely a dominant property of the engineering materials.…”

Section: Introductionmentioning

confidence: 99%

Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing

Zakrzewski

Jurewicz

Ćwikła

et al. 2020

Sensors

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Imaging scatterometry is a method for determining the reflection distribution based on bidirectional reflectance distribution function (BRDF) measurements. However, it has a well-known limitation that results obtained by imaging scatterometry for small illumination angles are practically useless. Therefore, we propose an approach for reconstruction of the reflection distribution based on a series of measurements at different illumination angles and extrapolation of the missing results to overcome this limitation. The developed algorithm was validated using bidirectional transmittance distribution function (BTDF) measurements. The BRDF measurements were carried out for materials that are commonly used in laser material processing, i.e. substrates and functional coatings. The obtained data were subsequently used to determine the total reflection intensity from all considered materials, which were characterized by reconstructed distributions.

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Area scanning method for 3D surface profilometry based on an adaptive confocal microscope

Cited by 13 publications

References 22 publications

Thickness Measurement for Glass Slides Based on Chromatic Confocal Microscopy with Inclined Illumination

Thickness Measurement for Glass Slides Based on Chromatic Confocal Microscopy with Inclined Illumination

Galvo-Scanning Chromatic Confocal Microscopy for High-Speed 3-D Surface Measurement

Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing

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