Area-selective atomic layer deposition of titanium oxide and nitride on vertically aligned carbon nanotubes patterned by Aerosol Jet Printing for 3D Microsupercapacitors

Miniaturized energy storage devices, such as electrostatic nanocapacitors and electrochemical micro-supercapacitors (MSCs), are important components in on-chip energy supply systems, facilitating the development of autonomous microelectronic devices with enhanced performance and efficiency. The performance of the on-chip energy storage devices heavily relies on the electrode materials, necessitating continuous advancements in material design and synthesis. This review provides an overview of recent developments in electrode materials for on-chip MSCs and electrostatic (micro-/nano-) capacitors, focusing on enhancing energy density, power density, and device stability. The review begins by discussing the fundamental requirements for electrode materials in MSCs, including high specific surface area, good conductivity, and excellent electrochemical stability. Subsequently, various categories of electrode materials are evaluated in terms of their charge storage mechanisms, electrochemical performance, and compatibility with on-chip fabrication processes. Furthermore, recent strategies to enhance the performance of electrode materials are discussed, including nanostructuring, doping, heteroatom incorporation, hybridization with other capacitive materials, and electrode configurations.

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Area-selective atomic layer deposition of titanium oxide and nitride on vertically aligned carbon nanotubes patterned by Aerosol Jet Printing for 3D Microsupercapacitors

Cited by 2 publications

References 42 publications

Miniaturizing Power: Harnessing Micro-Supercapacitors for advanced micro-electronics

Miniaturizing Power: Harnessing Micro-Supercapacitors for advanced micro-electronics

Emerging Capacitive Materials for On-Chip Electronics Energy Storage Technologies

Contact Info

Product

Resources

About