2005
DOI: 10.1117/12.601428
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ArF-resist line width slimming variation with threshold level in high precision CD-SEM measurement

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“…For example, it is well known that ArF resist patterns and some low-k dielectric materials are shrinkable by electron irradiation. Many reports have suggested methods to avoid these damages, 3 though the ideal solution for advanced devices has not been suggested yet.…”
Section: Introductionmentioning
confidence: 97%
“…For example, it is well known that ArF resist patterns and some low-k dielectric materials are shrinkable by electron irradiation. Many reports have suggested methods to avoid these damages, 3 though the ideal solution for advanced devices has not been suggested yet.…”
Section: Introductionmentioning
confidence: 97%