Arrays of highly complex noble metal nanostructures using nanoimprint lithography in combination with liquid-phase epitaxy

Abstract

Current best-practice lithographic techniques are unable to meet the functional requirements needed to enable on-chip plasmonic devices capable of fully exploiting nanostructure properties reliant on a tailored nanostructure size, composition, architecture, crystallinity, and placement. As a consequence, numerous nanofabrication methods have emerged that address various weaknesses, but none have, as of yet, demonstrated a large-area processing route capable of defining organized surfaces of nanostructures with the architectural diversity and complexity that is routinely displayed in colloidal syntheses. Here, a hybrid fabrication strategy is demonstrated in which nanoimprint lithography is combined with templated dewetting and liquid-phase syntheses that is able to realize periodic arrays of complex noble metal nanostructures over square centimeter areas. The process is inexpensive, can be carried out on a benchtop, and requires modest levels of instrumentation. Demonstrated are three fabrication schemes yielding arrays of core-shell, core-void-shell, and core-void-nanoframe structures using liquid-phase syntheses involving heteroepitaxial deposition, galvanic replacement, and dealloying. With the field of nanotechnology being increasingly reliant on the engineering of desirable physicochemical responses through architectural control, the fabrication strategy provides a platform for advancing devices reliant on addressable arrays or the collective response from an ensemble of identical nanostructures.

Spectrally Tailored Light‐Matter Interaction in Lithography‐Free Functional Nanomaterials

“…Such limitations have to be overcome for applications that require a perfect organization and monodispersity both at the nanoscale and at the macroscopic scale, such as sensing. In this context, several approaches have shown appealing results to grow nearly perfect 2D assemblies of noble metal nanoparticles: combining microstencil shadowed deposition with dynamic templating based on sacrificial layers and combining soft lithography with dynamic templating or thermal dewetting …”

“…shown appealing results to grow nearly perfect 2D assemblies of noble metal nanoparticles: combining microstencil shadowed deposition with dynamic templating based on sacrificial layers and [9] combining soft lithography with dynamic templating [10] or thermal dewetting. [11,12]…”

Straightforward Patterning of Functional Polymers by Sequential Nanosecond Pulsed Laser Irradiation

“…In order to obtain complex structures, different strategies have been developed based on chemical etching [ 10 , 11 ], lithographic techniques [ 12 , 13 ] or template-based methods [ 14 , 15 ]. Laser-based methods have demonstrated to be effective in the fabrication of surface micro- and nanostructures, which have found a wide range of applications [ 16 ].…”

Highly Conductive Al/Al Interfaces in Ultrafine Grained Al Compact Prepared by Low Oxygen Powder Metallurgy Technique

“…If it is possible to develop a powder metallurgy process that enables low temperature bonding comparable to that in SAB, not only for Al but also for other metals, the range of applications can be expanded to higher resolution metal 3D printing [ 19 , 20 ] and fabrication of microdevices by nanoimprinting [ 21 , 22 ]. In application to metal matrix composites, use of metal nanopowders can significantly increase the degree of dispersion when mixed with other nano-sized reinforcing agents such as CNT and graphene [ 23 , 24 ], and the reaction between the reinforcing agent and the metal matrix can be controlled in detail by controlling the temperature during densification, resulting in higher properties.…”