1993
DOI: 10.1007/bf00321420
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ARXPS-analysis of sputtered TiC, SiC and Ti0.5Si0.5C layers

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Cited by 84 publications
(46 citation statements)
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“…The relatively sharp peaks of the TiC͑111͒, TiC͑200͒, Ti͑002͒, and TiC͑110͒ ͓denoted as ͑d͒ in Fig. In their angle resolved XPS study of sputtered TiC layers, Schier et al 28 reported about two titanium related peaks at 281.2 and 281.9 eV. The GIXRD results in Fig.…”
Section: Resultsmentioning
confidence: 88%
“…The relatively sharp peaks of the TiC͑111͒, TiC͑200͒, Ti͑002͒, and TiC͑110͒ ͓denoted as ͑d͒ in Fig. In their angle resolved XPS study of sputtered TiC layers, Schier et al 28 reported about two titanium related peaks at 281.2 and 281.9 eV. The GIXRD results in Fig.…”
Section: Resultsmentioning
confidence: 88%
“…Six different peaks can be discovered and attributed to the different compositions of Ti. [45][46][47][48] However, in the high resolution Ti 2p curve of the TF samples ( Fig. S2c in the ESI †), only two obvious peaks were found, and they correspond to TiO 2 2p 1/2 and TiO 2 2p 3/2 .…”
Section: Resultsmentioning
confidence: 99%
“…Fits of the Ti 2p, C 1s, and Si 2p core‐level spectra were performed for a qualitative comparison of the samples. Binding energy ranges and boundary conditions for the fits were chosen according to the literature . Solid‐state magic angle spinning nuclear magnetic resonance (MAS NMR) spectra of 29 Si and 13 C were recorded at a spinning speed of 10 kHz on a Bruker Avance 400 MHz spectrometer featuring a 4 mm probe head and 4 mm ZrO 2 rotors.…”
Section: Methodsmentioning
confidence: 99%